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Pfeiffer TMH 065 - REBUILT

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Manufacturer Part Number: PM P02 356
Pfeiffer TMH 065 - REBUILT
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Pfeiffer TMH 065 - REBUILT

Pfeiffer Vacuum TMH 065 Turbomolecular Pump - REBUILT

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Specifications TMH 065 TMH/TMU 065
Inlet DN 40 ISO-KF DN 63 ISO-KF
DN 63 CF-F
Outlet DN 16 ISO-KF/G 1/4"
Venting connection G 1/8”
Maximum permissible rotor temperature 90°C
Permissible heat radiation power 4 W
Electronic drive unit TCP 0151)
Nominal rotation speed 90,000 l/min
Standby rotation speed 60,000 l/min
Run-up time (up to 90% rated rotation speed) 3 min
Noise level < 50 dB(A)
Final pressure, backing pump ≤ 5 mbar
Volume flow rate for:
    N2 30 l/s 56 l/s
    He 40 l/s 48 l/s
    H2 34 l/s 36 l/s
Compression ratio for:
    N2 > 1010
    He 1 x 107
    H2 1 x 105
Maximum fore-vacuum pressure
    N2 18 mbar
    He 15 mbar
    H2 8 mbar
Maximum gas throughput2)
    N2 0.8 mbar
    He 1 mbar
    H2 1.2 mbar
Final pressure3)
    w/ diaphragm vacuum pump < 1 x 10-9 mbar
    w/ rotary vane vacuum pump < 1 x 10-10 mbar
Lubricant TL 011
Cooling type, standard convection
Cooling water consumption w/ water at 15°C 15 l/h
Cooling water temperature 5-25°C
Permissible ambient temperature w/ air cooling 0-35°C
Heating power consumption 40 W
Weight 4.7 kg 4.7 / 5.1 kg
Permissible magnetic field 4 mT

 

1) Option: TCP 121, TCP 380

2) Measured with rotary vane vacuum pump 1.5 m3/h.

3) In accordance with DIN 28 428 the final pressure of a turbomolecular pump is that pressure which is attained in a measuring dome 48 hours after baking out.

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Pfeiffer Vacuum TMH 065 Turbomolecular Pump - REBUILT

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