Pfeiffer TMH 065 - REBUILT
Manufacturer Part Number: PM P02 356
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Pfeiffer TMH 065 - REBUILT
Pfeiffer Vacuum TMH 065 Turbomolecular Pump - REBUILT
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| Specifications | TMH 065 | TMH/TMU 065 |
|---|---|---|
| Inlet | DN 40 ISO-KF | DN 63 ISO-KF DN 63 CF-F |
| Outlet | DN 16 ISO-KF/G 1/4" | |
| Venting connection | G 1/8” | |
| Maximum permissible rotor temperature | 90°C | |
| Permissible heat radiation power | 4 W | |
| Electronic drive unit | TCP 0151) | |
| Nominal rotation speed | 90,000 l/min | |
| Standby rotation speed | 60,000 l/min | |
| Run-up time (up to 90% rated rotation speed) | 3 min | |
| Noise level | < 50 dB(A) | |
| Final pressure, backing pump | ≤ 5 mbar | |
| Volume flow rate for: | ||
| N2 | 30 l/s | 56 l/s |
| He | 40 l/s | 48 l/s |
| H2 | 34 l/s | 36 l/s |
| Compression ratio for: | ||
| N2 | > 1010 | |
| He | 1 x 107 | |
| H2 | 1 x 105 | |
| Maximum fore-vacuum pressure | ||
| N2 | 18 mbar | |
| He | 15 mbar | |
| H2 | 8 mbar | |
| Maximum gas throughput2) | ||
| N2 | 0.8 mbar | |
| He | 1 mbar | |
| H2 | 1.2 mbar | |
| Final pressure3) | ||
| w/ diaphragm vacuum pump | < 1 x 10-9 mbar | |
| w/ rotary vane vacuum pump | < 1 x 10-10 mbar | |
| Lubricant | TL 011 | |
| Cooling type, standard | convection | |
| Cooling water consumption w/ water at 15°C | 15 l/h | |
| Cooling water temperature | 5-25°C | |
| Permissible ambient temperature w/ air cooling | 0-35°C | |
| Heating power consumption | 40 W | |
| Weight | 4.7 kg | 4.7 / 5.1 kg |
| Permissible magnetic field | 4 mT | |
1) Option: TCP 121, TCP 380
2) Measured with rotary vane vacuum pump 1.5 m3/h.
3) In accordance with DIN 28 428 the final pressure of a turbomolecular pump is that pressure which is attained in a measuring dome 48 hours after baking out.
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Pfeiffer Vacuum TMH 065 Turbomolecular Pump - REBUILT PMP02356 / PM P02 356 TMH 065 DN 63 ISO-KF 19 pin PMP02352 / PM P02 352 TMH 065 DN 40 ISO-KF PMP02350 / PM P02 350 TMH 065 DN 63 ISO 8 pin PMP02357 / PM P02 357 TMU 065 DN 63 CF 19 pin PMP02351 / PM P02 351 TMU 065 DN 63 CF 8 pin TMH 071P TMU 064 TMU 071 TPH 040A TPH 050 TPH 060 TPH 061 TPH 062 TPH 065 TPU 050
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