Pfeiffer TMH 1600 PC - REBUILT
Manufacturer Part Number: PM K01 740
Pfeiffer Vacuum TMH 1600 PC Turbomolecular Pump - REBUILT
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Specifications | TMH/TMU 1600 | TMH/TMU 1600 C | ||
---|---|---|---|---|
Inlet | DN 200 ISO-K DN 200 CF-F |
DN 250 ISO-K DN 250 CF-F |
DN 200 ISO-K DN 200 CF-F |
DN 250 ISO-K DN 250 CF-F |
Outlet | DN 40 ISO-KF/G 1/4" | |||
Venting connection | G 1/8” | |||
Electronic drive unit | TCP 380/TCP 600 | TCP 600 | ||
Nominal rotation speed | 36,000 l/min | |||
Standby rotation speed | 24,000 l/min | |||
Run-up time (up to 90% of the nominal rotation speed fore-vacuum pressure ≤ 0.1 mbar) | 21/7 min | 7 min | ||
Final pressure, backing pump | ≤ 5 mbar | ≤ 2.5 mbar | ||
Maximum permissible rotor temperature | 120°C | |||
Permissible heat radiation power | 35 W | |||
Volume flow rate for: | ||||
N2 | 1,100 l/s | 1,500 l/s | 1,100 l/s | 1,500 l/s |
He | 1,320 l/s | 1,450 l/s | 1,320 l/s | 1,450 l/s |
H2 | 1,050 l/s | 1,150 l/s | 1,050 l/s | 1,150 l/s |
Ar | - | - | 1,050 l/s | 1,400 l/s |
CF4 | - | - | 850 l/s | 1,100 l/s |
Compression ratio for: | ||||
N2 | > 1012 | |||
He | > 1 x 108 | |||
H2 | 3 x 106 | |||
Ar | > 1012 | |||
CF4 | > 1012 | |||
Maximum fore-vacuum pressure | ||||
N2 | 12 mbar l/s | |||
He | 10 mbar l/s | |||
H2 | 4 mbar l/s | |||
Ar | 12 mbar l/s | |||
CF4 | 12 mbar l/s | |||
Maximum gas throughput | ||||
N2 | 51) (10) mbar l/s | |||
He | 51) (14) mbar l/s | - | ||
H2 | 41) (17) mbar l/s | - | ||
Ar | - | 14.52) (5.5) mbar l/s | ||
CF4 | - | 152) (8) mbar l/s | ||
Recommended backing pump | ||||
Rotary vane pump | DUO 010 M | |||
Diaphragm vacuum pump | MD 4T | MD 4TC | ||
Dry three stage backing pump | UniDryTM | UniDryTM | ||
Final pressure w/ | ||||
DUO 010 M | < 1 x 10-10 mbar | |||
MD 4T / MD 4TC | ||||
UniDryTM | ||||
Lubricant | ||||
Type3) | TL 011 or F3 | F3 | ||
Filling volume | 65 | |||
Max cooling water consumption w/ water at 15°C4) | 100 l/h | |||
Cooling water temperature | 5-25°C | |||
Permissible ambient temperature w/ air cooling | 0-35°C | - | ||
Permissible magnetic field | 3 mT | |||
Heating power consumption | 170 W | |||
Weight | 49 / 51 kg | 51 / 53 kg | 51 kg | 51 / 53 kg |
Noise level | < 47 dB(A) |
1) Measured with a rotary vane pump 1.5 m3/h; Values in brackets with a backing pump > 5 m3/h.
2) With a backing pump 16 m3/h in standby operations; values in brackets at nominal rotation speed.
3) See rating plate.
4) With maximum gas throughput.
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Pfeiffer Vacuum TMH 1600 PC Turbomolecular Pump - REBUILT PMK01740 / PM K01 740 TMH 1600 PC DN 200 ISO-K TMH 1600 TMH 1600C TMH 1601P TMH 1601PCH TMH 1601PCHT TMU 1600M TMU 1600PC TPH 1600 TPH 1600F