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Pfeiffer TMU 521 - REBUILT

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Manufacturer Part Number: PM P02 845
Pfeiffer TMU 521 - REBUILT
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Pfeiffer TMU 521 - REBUILT

Pfeiffer Vacuum TMU 521 Turbomolecular Pump - REBUILT

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Pfeiffer Vacuum TMH / TMU 521

Specifications TMH / TMU 521 P
Inlet DN 100 ISO-K DN 100 CF-F DN 160 ISO-K DN 160 CF-F
Outlet DN 25 ISO-KF/G 1/4"
Venting connection G 1/8”
Nominal rotation speed 50,000 l/min
Standby rotation speed 33,000 l/min
Start-up time 5.5 min
Noise level < 50 dB(A)
Final pressure, backing pump < 5 mbar
Maximum permissible rotor temperature 90°C
Permissible heat radiation power 14 W
Volume flow rate for:
    N2 300 l/s 500 l/s
    He 400 l/s 500 l/s
    H2 400 l/s 480 l/s
Compression ratio for:
    N2 > 1012
    He 5 x 107
    H2 5 x 106
Maximum fore-vacuum pressure
    N2 16 mbar
    He 14 mbar
    H2 7 mbar
Maximum gas throughput w/ water cooling 1)
        N2 3 mbar l/s
        He 4 mbar l/s
Vertex power characteristics line 2)
        A 185 W / 833 Hz
        B 260 W / 485 Hz
        C 160 W / 833 Hz
        D 260 W / 435 Hz
Final pressure 3)
    w/ diaphragm vacuum pump < 1 x 10-8 mbar
    w/ rotary vane vacuum pump < 5 x 10-10 mbar
Lubricant TL 011
Max cooling water consumption w/ water at 15°C 4) 100 l/h
Cooling water temperature 5 - 25°C
Permissible ambient temperature w/ air cooling 0 - 35°C
Heating power consumption 100 W
Weight 13 kg 13.5 kg
Permissible magnetic field 5.0 mT
Operating voltage 72 ± 5% VDC
Duration 4) - / max. current consumption 3.2 / 4.2 A
Duration 4) - / max. power 230 / 300 W
Protection class 5) IP 30
Relative humidity 5 - 85% non-condensing

 

1) Measured with a rotary vane pump 1.5 m3/h; higher throughputs with reduced rotation speed.

2) For gas type characteristic lines please refer to section 4.4.

3) In accordance with German Industrial Standard 28428 the final pressure which is attained in a measuring dome 48 hours after baking out.

4) At maximum gas throughput.

5) Protection class IP 54 is afforded for the Electronic Drive Unit TC 600 by refro-fitting a cover plate.

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Pfeiffer Vacuum TMU 521 Turbomolecular Pump - REBUILT

PMP02845A / PM P02 845 A  DN 160 CF-F