PTB Sales offers vacuum component support for your Plasma-Therm high vacuum systems - Versaline, Singulator, Vision, Apex, Pinnacle, LAPECVD, Versalock, Mask Etcher, Odyssey. System cores and spare pumps are also available.

Typical spares and service for Plasma-Therm high vacuum systems:

• Cryopumps
• Turbo Pumps
• Dry Pumps
• Valves
• Power Supplies
• Robots