By Industry > Research & Development

Research & Development

PTB Industry Focus: Research & Development

PTB Sales has been supporting Government, Educational and Commercial Research & Development Laboratories and Facilities for approximately two decades with a variety of services across a broad array of equipment.

R&D Facilities use a very wide variety of vacuum equipment in their research and development projects.  Often, they require applications and engineering support in order to both select the proper vacuum pump and optimize the performance.

PTB provides the following services to R&D:

We provide this high level of support across the full spectrum of vacuum equipment types and manufacturers and have been doing so for many years:

PTB is perfectly suited to support R&D Facilities as we provide the highest quality services across the widest breadth of vacuum pump types and OEMs in North America.  This type of product and service breadth in addition to our engineering and applications support allows us to provide the flexible, knowledge based support that R&D customers need to be successful.

Additionally, PTB provides custom vacuum manufacturing services.  This capability allows us to engage with Labs, understand the performance requirements, jointly develop specs and deliver custom vacuum systems that are tailored to the specific research application.

 

University Process Equipment Spares Supported
1. Branson Resist Strip
2. Aura 1000 Resist Strip
3. Glen 1000 Resist Strip
4. Oxford 100 Etcher
5. Unaxis 770 Deep Si Etcher
6. PlasmaTherm Deep Si Etcher
7. Xactix Xenon Difluoride Etcher
8. Veeco Ion Mill
9. PT770 Etcher
10. Trion Etcher
11. Oxford 100 Etcher
12. PT770 Etcher
13. Oxford 81 Etcher #1
14. Oxford 82 Etcher #2
15. PT72 Etcher
16. MVD100
17. Oxford ALD FlexAL
18. LPCVD CMOS Nitride - E4
19. TFT LPCVD LTO410 - A3
20. Parylene Deposition
21. SC4500 Odd-Hour Evaporator #1
22. SC4500 Even-Hour Evaporator #2
23. CHA Evaporator
24. Ion Implant - Eaton
25. CVC Sputter Deposition
26. PVD75 Sputter Deposition
27. MVD100
28. Oxford ALD FlexAL
29. LPCVD Nitride - B4
30. LPCVD CMOS Nitride - E4

R&D Semiconductor Process Equipment Spares Supported
1. Gasonics Asher
2. 2-STS ICP Plasma Etchers
3. Xactix Plasma Etcher
4. Plasma Therm ICP RIE Plasma Etcher
5. STS ICP SOE Plasma Etcher
6. Trion ICP RIE Plasma Etcher
7. Vision RIE 2 Plasma Ecther
8. Plasma Therm RIE Plasma Etcher
9. Plasma Therm SLR RIE Plasma Etcher
10. 2-Atomic Layer Deposition Systems
11. CVC E-Beam Evaporator
12. PVD 75 Filament Evaporator
13. ASTEX ECR PECVD
14. Plasma Therm PECVD
15. Unaxis PECVD
16. 2- STS PECVD
17. Earnest Fullam Sputter Coater
18. Hummer Sputtering System
19. Denton Discovery RF/DC Sputter System
20. PVD 75 RF Sputtering System
21. Unifilm Sputtering System

Nanotechnology System Spares Supported
1. Cambridge Nanotech S200 Thin Film Deposition
2. Denton Explorer 14
3. Lesker Nano 36
4. Lesker PVD 75 2
5. Lesker PVD 75 3
6. Oxford Plasma Lab 100
7. Paralyne Deposition System
8. Trion Phantom III Reactive Ion Etch (RIE) System

R&D Process Equipment Spares Supported
1. Anatech Barrel Asher-RIE3
2. Anatech Barrel Asher -RIE 9
3. Fishione Specimen Plasma Cleaner
4. Samco RIE 4 Plasma Etcher
5. Technics RIE 5 Plasma Etcher
6. Nexx Systems RIE Plasma Etcher
7. Plasma Therm Unaxis ICP RIE 7
8. STE RIE ICP 8
9. South Bay Tech. RIE 1
10. Cambridge Nano Tech ALD 1
11. Denton Vacuum E-Beam Evaporator
12. Edwards E-Beam Evaporator
13. Lesker E-Beam Evaporator
14. Sharon Vacuum E-Beam Evaporator
15. Key High Vacuum Thermal Evaporator
16. 3- Sharon Vacuum Thermal Evaporators
17. Nexx Systems PECVD
18. Seki Technotron PECVD Diamond
19. STS PECVD
20. Cressington Specimen Coater
21. Fischione 1010 Dual Beam Ion Miller
22. Fischione 1040 Nanomill
23. Gatan Precision Ion Miller
24. AJA International Sputtering System SP 2
25. AJA International Sputtering System SP 3
26. Baltec Carbon Coater
27. Balzers Freeze Etching System

R&D University Spares
1. Branson Asher
2. Jelight UV Ozone Cleaner
3. Plasma Therm Deep Trench Etcher
4. Technics Ion Miller
5. Advanced Vacuum Dielectric Etcher
6. STS Etcher
7. Cambridge Nano Tech ALD System
8. CHA Electron Beam Evaporator
9. Temescal Electron Beam Evaporator
10. Varian Electron Beam Evaporator
11. Plasma Therm PE CVD System
12. AJA International Sputtering System
13. Perkin Elmer DC Sputter System