RF Plasma

RF power supplies are for RF sputtering, RF Bias, RF Etch/ashing and induction heating. RF sputtering supplies are typically set at 13.56 MHz. They are an excellent source for sputtering dielectrics. Many are solid state; however less expensive tube types are available. Power ranges from 100 W to 5 kW for solid state supplies and tube supplies can go to 40 kW. Some applications require low frequency power supplies. Most run from 50 to 460 kHz. Induction heating power supplies are available. We sell the: Advanced Energy RF, Comdel: 13.56 RF power supply and Low RF power supply, ENI: 13.56 RF power supply and Low RF power supply and RFPP: 13.56 RF power supply and Low RF power supply. They are high power (7.5 kW to 40 kW) and run at 450 kHz. Most are tube type.

Sub-Categories