MKS ASTeX ASTRON Reactive Gas Generators
ASTRONi
$8,800 ASTRONi AX7670 Remote Plasma Source: rated to 3.0 slm NF3 flow rate, remote source for reactive gas by generating atomic fluorine. ASTRONi data sheet.
ASTRONex
$7,200 ASTeX ASTRONex Fl20620 generator. 400 kHz output, 208 3φ input, 38 lbs.
The MKS ASTeX ASTRONex reactive gas generator is a reactive source for chamber cleaning and other reactive gas applications. The ASTRONex uses low field toroidal plasma to dissociate input gas to produce downstream reactive chemistries. It effectively dissociates alternative gases such as C3F8 and CF4 as an atomic florine generator.
| Specifications | ASTRONi | ASTRONex |
|---|---|---|
| Gas Supply | 100% Ar for ignition only | |
| Operating Pressure | 1 to 4 Torr during ignition measured at ASTRON outlet 1 to 10 Torr post ignition measured at ASTRON outlet once flow is stabilized | |
| Reactant Output | >94% dissociation up to 2.5 slm, 3 to 10 Torr >94% dissociation up to 3.0 slm, 5 to 10 Torr | >98% dissociation up to 6 slm NF3 |
| Wetted Materials | 6061-T6 Aluminum hardcoat anodized, Chemraz, Alumina, Sapphire | |
| Control Interface | 9 and 25pin D, opto-isolated I/O | |
| Inputs | On/Off | |
| Outputs | Ready, AC line, Plasma On | |
| Power | 180 to 228 VAC, 50/60 Hz, 30A, 3 phase | 187 to 228 VAC, 50/60 Hz, 60A, 3 phase |
| Cooling water | 1.5 gpm, <30°C | 2.0 gpm, <30°C |
| Ambient temp. | 40°C max | |
| Compliance | S2-0200, CE, NRTL, SEMI F47 | |
Dimensions
