Used Genmark Automation Robots & Controllers
 |
|
Ask for current prices. Visit Genmark Automation for more information on these Axcelis tool wafer handling robots.
| Specifications | GB4P | GB7S |
|---|---|---|
| Arm configurations | 4"-8"-4", 5.25"-5.25" | 5.25"-5.25", 8"-8", 4"-8"-4", 6"-12"-6" |
| Maximum reach | Three-Link Arm 32" Two-Link Arm 21" | Three-Link Arm (6"-12"-6") 48" Three-Link Arm (4"-8"-4") 32" Two-Link Arm (8"-8") 32" Two-Link Arm (5.25"-5.25") 21" |
| Maximum vertical stroke | 20" | 8", 12.5", 17", 20" |
| Maximum velocity | T = 875°/sec R = 87.5"/sec Z = 30"/sec | T = 800°/sec R = 100"/sec Z = 20"/sec If equipped with Y and Y2 end-effector: Y = 1,500°/sec Y2 = 1,500°/sec |
| Maximum acceleration | T = 2,000°/sec2 R = 200"/sec2 Z = 40"/sec2 | T = 2,500°/sec2 R = 200"/sec2 Z = 40"/sec2 If equipped with Y and Y2 end-effector: Y = 2,500°/sec2 Y2 = 2,500°/sec2 |
| Minimum work envelope | (Equipped with 4"-8"-4" arm and 7" end-effector, 200mm wafer) D = 13.35" | (Equipped with 6"-12"-6" arm and 9.5" end-effector) 200mm wafer: D = 18" 300mm wafer: D = 20" |
| Repeatability | T = +/-0.01° R = +/-0.001" Z = +/-0.001" | |
| Max wafer size | 200mm | 300mm |
| Robot weight | 59 lbs. (for 7" vertical travel and 4"-8"-4" arm) | 75 lbs. |
| Payload capacity | 2 lbs. | 2.5 lbs. |
Remote Pre-Aligner (RPA)
| Specifications | RPA |
|---|---|
| Vertical travel | 0, 8.5", 13.5", 16.5" |
| Alignment time | 5 seconds |
| Alignment accuracy | Center offset - 0.002" Angular offset - 0.1° |
| Maximum velocity of the vertical motion | 20"/s |
| Maximum acceleration of the vertical motion | 40"/s2 |
| Initial offset allowance | 0.5" |
| Wafer Sizes | 100mm, 125mm, 150mm, 200mm, 300mm |
| Weight | 10 lbs. |
Large, Small & S08R5GP.D Controllers
 |
|
Ask for current prices. Visit Genmark Automation for more information.