Shimadzu TMP-2804LMC - REBUILT
Manufacturer Part Number: AAJA0595
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Shimadzu TMP-2804LMC - REBUILT
Shimadzu TMP-2804LMC Turbomolecular Vacuum Pump - REBUILT
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| Inlet flange | VG250 / ISO250B | ||
| Outlet flange | KF40 | ||
| Cooling method | Water | ||
| Ultimate pressure (after baking) (Note 1) | 10-7 Pa order | ||
| Maximum allowable Argon gas flow rate | 1,250 mL/min (Note 1) | 1,900 mL/min | |
| Maximum allowable inlet pressure (N2 continuous exhaust) | 40 Pa | ||
| Maximum allowable outlet pressure | 270 Pa | ||
| Pumping speed (Note 2) | N2 | 2,800 l/s | |
| Ar | 2,700 l/s | ||
| Compression ratio | N2 | 1 x 108 or more | |
| He | 5 x 103 | ||
| H2 | 9 x 102 | ||
| Rated speed | 27,600 rpm | ||
| Start-up time | 12 minutes or less | ||
| Mounting position | In any desired direction | ||
| Vibration level (by Shimadzu's method) | 0.01 µm or less (0-peak) | ||
| Recommended pumping speed of backing pump in case of gas purge | 1,500 L/min or more | ||
| Environmental temperatures | 0 to 40 degrees C. | ||
| Admissible ambient magnetic field | Radial direction | 3 mT | |
| Axial direction | 15 mT | ||
| Water | Flow rate | 2 to 4 L/min | |
| Pressure | 0.2 to 0.5 MPa | ||
| Temperature | 5 to 25 degrees C. | ||
| Mass | 84 kg | ||
| (Note 1) | mL/min : volume flow rate at 0 degrees C., 1 atm. (compatible with SCCM.) |
| (Note 2) | W/out a protective net for VG250 flange. Pumping speed for N2 is 2,550 L/s with a protective net. |
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Shimadzu TMP-2804LMC Turbomolecular Vacuum Pump - REBUILT
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