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Shimadzu TMP-2804LMC - REBUILT

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Manufacturer Part Number: AAJA0595
Shimadzu TMP-2804LMC - REBUILT
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Shimadzu TMP-2804LMC - REBUILT

Shimadzu TMP-2804LMC Turbomolecular Vacuum Pump - REBUILT

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Inlet flange VG250 / ISO250B
Outlet flange KF40
Cooling method Water
Ultimate pressure (after baking) (Note 1) 10-7 Pa order
Maximum allowable Argon gas flow rate 1,250 mL/min (Note 1) 1,900 mL/min
Maximum allowable inlet pressure  (N2 continuous exhaust) 40 Pa
Maximum allowable outlet pressure 270 Pa
Pumping speed  (Note 2) N2 2,800 l/s
Ar 2,700 l/s
Compression ratio N2 1 x 108 or more
He 5 x 103
H2 9 x 102
Rated speed 27,600 rpm
Start-up time 12 minutes or less
Mounting position In any desired direction
Vibration level (by Shimadzu's method) 0.01 µm or less (0-peak)
Recommended pumping speed of backing pump in case of gas purge     1,500 L/min or more
Environmental temperatures 0 to 40 degrees C.
Admissible ambient magnetic field Radial direction 3 mT
Axial direction 15 mT
Water Flow rate 2 to 4 L/min
Pressure 0.2 to 0.5 MPa
Temperature 5 to 25 degrees C.
Mass 84 kg

 

(Note 1) mL/min : volume flow rate at 0 degrees C., 1 atm. (compatible with SCCM.)
(Note 2) W/out a protective net for VG250 flange. Pumping speed for N2 is 2,550 L/s with a protective net.

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Shimadzu TMP-2804LMC Turbomolecular Vacuum Pump - REBUILT