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Shimadzu TMP-403LM - REBUILT

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Shimadzu TMP-403LM - REBUILT
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Shimadzu TMP-403LM - REBUILT

Shimadzu TMP-403LM Turbomolecular Vacuum Pump - REBUILT

This Shimadzu TMP-403LM high pumping throughput molecular pump is clean. View our inventory of Shimadzu turbo pumps.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Turbomolecular pump TMP-403M TMP-403MC TMP-403LM TMP-403LMC
Suitable power supply unit EI-D303M
Cooling method Cooling fan Water
Ultimate pressure (Note 1) 10-8 Pa order 10-7 Pa order 10-8 Pa order 10-7 Pa order
Maximum allowable inlet pressure
(N2)
1.3 Pa 200 Pa
Maximum allowable outlet pressure 40 Pa 400 Pa
Pumping speed (Note 4) N2 420 l/s
He 360 l/s
H2 340 l/s
Compression ratio N2 1 x 109
He 8 x 104
H2 1 x 104
Rated speed 45,000 rpm
Start-up time 5 minutes or less
Mounting position In any desired direction (Note 7)
Bake-out temperature at an inlet flange 120°C or less
Vibration level (by Shimadzu's method) 0.012 µm or less (0-peak)
Inlet flange ICF203 (Note 6)
Outlet flange KF25
Mass 14 kg
Admissible throughput of purge gas 20 to 30 ml/min (Note 8)
Admissible pumping speed of backing vacuum pump in case of gas purge 200 l/min or more
Environmental temperatures Operation: 0 to 40°C / Storage: -25 to 70°C
Admissible ambient magnetic field Radial direction 3 mT
Axial direction 15 mT
Water Flow rate N/A 1 to 3 l/min
Pressure 0.2 to 0.5 MPa
Temperature 5 to 30°C
  • (Note 1) When using a metal at the inlet flange. When using an o-ring gasket, the ultimate pressure is 10-7 Pa order.
  • (Note 2) Without a protective net. Pumping speed for N2 is 180 l/s with a protective net.
  • (Note 3) Without a protective net. Pumping speed for N2 is 300 l/s with a protective net.
  • (Note 4) Without a protective net. Pumping speed for N2 is 400 l/s with a protective net.
  • (Note 5) ISO100 bolted flange, VG100 flange are also available.
  • (Note 6) ISO160 bolted flange, VG150 flange are also available.
  • (Note 7) The outlet of the magnetic bearing turbo molecular pump should face horizontally or vertically when installing horizontally.
  • (Note 8) ml/min : volume flow rate at 0°C, 1 atm. (Compatible with SCCM.)

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Shimadzu TMP-403LM Turbomolecular Vacuum Pump - REBUILT

262-81455-41 / 2628145541  TMP-403LM  ICF203
262-81455-42 / 2628145542  TMP-403LM  VG150
262-81455-43 / 2628145543  TMP-403LM  ISO160
262-81455-51 / 2628145551  TMP-403LMC  ICF203
262-81455-52 / 2628145552  TMP-403LMC  VG150
262-81455-53 / 2628145553  TMP-403LMC  ISO160
262-81455-61 / 2628145561  TMP-403M  ICF203
262-81455-62 / 2628145562  TMP-403M  VG150
262-81455-63 / 2628145563  TMP-403M  ISO160
262-81455-71 / 2628145571  TMP-403MC  ICF203
262-81455-72 / 2628145572  TMP-403MC  VG150
262-81455-73 / 2628145573  TMP-403MC  ISO160