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Shimadzu TMP-3203LMC Turbo Vacuum Pump - REBUILT

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RFQ

Manufacturer Part Number: TMP-3203LMC-A1
Shimadzu TMP-3203LMC Turbo Vacuum Pump - REBUILT
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Shimadzu TMP-3203LMC Turbomolecular Vacuum Pump - REBUILT

This Shimadzu TMP-3203LMC high pumping throughput molecular pump includes a controller and cable, and a one year warranty. View our inventory of Shimadzu turbo pumps.

Specifications TMP-3203LMC
Rotor coating Coated
Cooling method Water cooled
Ultimate pressure (after baking) Pa
(Torr)
10-8 order
(10-10 order)
Maximum inlet pressure Pa
(Torr)
40Pa
(0.3 Torr)
Maximum outlet pressure Pa
(Torr)
270Pa
(2 Torr)
Pumping speed N2
He
H2
3,200 L/s
3,000 L/s
2,400 L/s
Compression ratio N2
He
H2
109 or higher
3×105
1×104
Rated rotation speed 21,000 R.P.M.
Startup time 13 minutes
Direction of installation Arbitrary
Baking temperature of pump inlet 120°C or lower
Vibration, measured by the Shimadzu method Less than 0.01 ?m
Weight 70 kg
Recommended purge gas flow rate 20 - 30 mL/min
Recommended pumping speed of backing vacuum pump during gas purging 1,500 L/min. or higher
Operational ambient temperature range 0 - 40°C
Allowable magnetic flux density
Radial directions
Axial directions
3 mT
15 mT
Applicable power supply model EI-D3203M

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Shimadzu TMP-3203LMC Turbomolecular Vacuum Pump - REBUILT

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