Shimadzu TMP-3203LMC - REBUILT
Manufacturer Part Number: TMP-3203LMC-A1
Shimadzu TMP-3203LMC Turbomolecular Vacuum Pump - REBUILT
This Shimadzu TMP-3203LMC high pumping throughput molecular pump includes a controller and cable, and a one year warranty. View our inventory of Shimadzu turbo pumps.
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Specifications | TMP-3203LMC |
---|---|
Rotor coating | Coated |
Cooling method | Water cooled |
Ultimate pressure (after baking) Pa (Torr) |
10-8 order (10-10 order) |
Maximum inlet pressure Pa (Torr) |
40Pa (0.3 Torr) |
Maximum outlet pressure Pa (Torr) |
270Pa (2 Torr) |
Pumping speed N2 He H2 |
3,200 L/s 3,000 L/s 2,400 L/s |
Compression ratio N2 He H2 |
109 or higher 3 × 105 1 × 104 |
Rated rotation speed | 21,000 rpm |
Startup time | 13 minutes |
Direction of installation | Arbitrary |
Baking temperature of pump inlet | 120°C or lower |
Vibration, measured by the Shimadzu method | Less than 0.01 ?m |
Weight | 70 kg |
Recommended purge gas flow rate | 20 - 30 mL/min |
Recommended pumping speed of backing vacuum pump during gas purging | 1,500 L/min. or higher |
Operational ambient temperature range | 0 - 40°C |
Allowable magnetic flux density Radial directions Axial directions |
3 mT 15 mT |
Applicable power supply model | EI-D3203M |
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Shimadzu TMP-3203LMC Turbomolecular Vacuum Pump - REBUILT TMP-3203M (Air cooled type) 262-78430-62 2627843062 VG350 262-78430-63 2627843063 ISO320B Special 262-78430-67 2627843067 VG300 262-78430-68 2627843068 VG250 TMP-3203MC (Air cooled chemical type) 262-78430-72 2627843072 VG350 262-78430-73 2627843073 ISO320B Special 262-78430-77 2627843077 VG300 262-78430-78 2627843078 VG250 TMP-3203LM (Wide range type) 262-78430-42 2627843042 VG350 262-78430-43 2627843043 ISO320B Special 262-78430-47 2627843047 VG300 262-78430-48 2627843048 VG250 TMP-3203LMC (Wide range chemical type) 262-78430-52 2627843052 VG350 262-78430-53 2627843053 ISO320B Special 262-78430-57 2627843057 VG300 262-78430-58 2627843058 VG250