Applied Materials Endura PVD Chambers & Parts

Clean Parts
Description AMAT # Price
Centura DPS Throttle Valve 0010-30135 $4,000
Centura DPS Throttle Valve 0010-30135 $4,000
Centura DPS Throttle Valve 0010-30135 $4,000
Centura DPS Throttle Valve Poly Kit 0010-35673 $4,000
Centura DPS Throttle Valve Poly Kit 0010-36908 $4,000
Centura DPS Throttle Valve Poly Kit 0010-36908 $4,000
Endura Chamber 0040-07498 $7,500
Endura Chamber 0040-33914 $8,500
PVD Magnet 0010-12582 $7,000
Pedestal Lift Assembly Preclean 2K (3) 0010-13927 $8,500
Lower Shield 0020-29711 ask
Lower Shield 0021-07406 ask
Middle Edge Ring 0021-07586 ask
Middle Edge Ring 0021-07586 ask
Outer Shield 0021-07984 ask
Plate Cover 0021-08533 ask
Edge Ring 0021-11110 ask

Clean Parts
Description AMAT # Price
Edge Ring 0021-11110 ask
Upper Shield 0021-12555 ask
Upper Shield 0021-12555 ask
Upper Shield 0021-12555 ask
Upper Shield 0021-21234 $575
Lower Shield 0021-22065 ask
Lower Shield 0021-22065 ask
Lower Shield 0021-22065 ask
Cover Ring 0021-22177 ask
Applied Materials LSI Shield-Upper TiN (3) 0020-23043 ask
NORCAL angle valve (22) 0190-40017 $215

Clean Parts
Description AMAT # Price
Assembly, Throttle Valve Flange (6) 0010-08384 ask
Maglev Rotation Controller, 200mm 0190-11670 $1,750
Ring, Deposition, Deeper, Groove, 200mm 0200-01155 $1,350
Plate, Blocker, TxZ, 200mm 0021-35744 $650
5500 TxZ Shower Head, Plate-Perf, 200mm (5) 0021-35869 $600
5500 Vector Shield, Imp, Lower 0020-29344 $1,500
PCBA, Stepperdrive 0100-35034 ask
Control, Stepper, 5 Phase 0100-90172 ask
Liner, Base 0020-86737 ask
Adaptor, Source 13" W/B 0040-22023 $850
Assy, PCB, Robot, Xtrack 0100-77035 $325
Cover Ring 0021-22177 ask
Cover Ring 0021-22177 ask
Pedestal 0021-22224 ask
Blocker Plate 0021-37996 ask
Inner Shield 0040-04586 ask
Shower Head 0040-08492 ask
Shower Head 0040-08492 ask
4 Channel Calibration Tool 300mm 0190-17416 ask

Clean Parts
Description AMAT # Price
Chamber Insert 0200-00531 ask
Ceramic Lid Isolator 0200-00554 ask
Ceramic Lid Isolator 0200-00554 ask
Ceramic Ring 0200-36399 ask
Cover Ring 0200-76057 ask
Cover Ring 0200-76057 ask
Calibration Lid Assembly 0240-04276 ask
Device Net Meter Kit 0240-29122 ask
Calibration Tool Kit 0240-42288 ask
Robot Calibration Kit 300mm 0242-19661 ask
Install Tool Collar 300mm 0270-00689 ask
Calibration Tool Robot 300mm 0270-00735 ask
Cathode Assembly Install Tool 300mm 0270-00739 ask
Cathode Stand 0270-00860 ask
Slam Kit 233-4939-71 ask
Exhaust Flange* 5000-30330 ask
TC Plate* 5000-30331 ask

*We have 8 Exhaust Flanges and 12 TC Plates in stock.

What you need, when you need it!


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