 |
| Description |
AMAT # |
Price |
| Assembly, Throttle Valve Flange (6) |
0010-08384 |
ask |
| Maglev Rotation Controller, 200mm |
0190-11670 |
$1,750 |
| Ring, Deposition, Deeper, Groove, 200mm |
0200-01155 |
$1,350 |
| Plate, Blocker, TxZ, 200mm |
0021-35744 |
$650 |
| 5500 TxZ Shower Head, Plate-Perf, 200mm (5) |
0021-35869 |
$600 |
| 5500 Vector Shield, Imp, Lower |
0020-29344 |
$1,500 |
| PCBA, Stepperdrive |
0100-35034 |
ask |
| Control, Stepper, 5 Phase |
0100-90172 |
ask |
| Liner, Base |
0020-86737 |
ask |
| Adaptor, Source 13" W/B |
0040-22023 |
$850 |
| Assy, PCB, Robot, Xtrack |
0100-77035 |
$325 |
| Cover Ring |
0021-22177 |
ask |
| Cover Ring |
0021-22177 |
ask |
| Pedestal |
0021-22224 |
ask |
| Blocker Plate |
0021-37996 |
ask |
| Inner Shield |
0040-04586 |
ask |
| Shower Head |
0040-08492 |
ask |
| Shower Head |
0040-08492 |
ask |
| 4 Channel Calibration Tool 300mm |
0190-17416 |
ask |
|