Used Innotec VSC 24C
Batch Vertical Sputter System
sold
System
This Innotec VS 24C is a batch type sputtering system. The cryopump is side mounted with a high conductance gate valve. The fixturing is a 24" flat plate planetary with rf bias etch capability. Each of the six planets is 7 1/2" driven at 9x hub speed, RF rated to 1kW. There is currently one water cooled cathode; the other two holes are blanked off.
Chamber
304 stainless steel, 24" diameter by 12" high cylindrical chamber
The chamber sides are faceted to allow easy addition of feedthroughs. A 4" view port is installed in the front. The system bottom plate is easily removable, Viton 0-ring sealed and is entirely useable for mounting sources or tooling. The top plate is Viton O-ring sealed and is supported by a hydraulic hoist for ample vertical travel.
The top plate is open for sources or tooling except for the few square inches required for hoist attachment. The chamber is supported by a welded steel tube frame at a height that allows ease of operation and service. The cryopump stack and all valving is enclosed but readily accessible for maintenance.
Valves
All the valves are electropneumatic, utilizing bellows and Viton O-rings.
Specification for Model VS 24C
- Chamber Construction
- Electropolished stainless steel
- Side pumped
- 16 sided
- .70" flanges top and bottom
- Dovetail grooves on inside of both flanges for tooling attachment
- 23" inside diameter
- 26" outside diameter
- 12" high
- 4" view port
- 2 3/4" Conflat flange RGA port
- 7 ea. 1" diameter feedthrough holes
- Top and Bottom Plate
- Electropolished stainless steel
- Viton O-ring sealed
- Source, tooling and feedthrough holes
- .70" thick
- Frame and Cabinetry
- Welded steel tube frame
- Adjustable feet
- Formed steel panels
- Hinged front and rear doors
- Side panels hung with magnetic retainers
- Textured enamel finish
- Hoist
- Heavy duty
- Hydraulic electropneumatic control
- Fully Interlocked
- Fail safe on power loss
- System/Gauge/Valve Controller
- Innotec VSC Vacuum System Controller
- High Vacuum Pump
- CTI Cryo-Torr 8 for clean, high speed pumping
- Pumping speed: 4000 l/s water
- Pumping speed: 1500 l/s air
- Roughing Pump
- Leybold D30A, 27 cfm
- High Vacuum Valve
- Stainless Steel Gate Valve
- 8" clear aperture
- Electropneumatic
- Viton O-ring sealed bonnet
- Bellows sealed actuator arm
- Roughing Valve
- Stainless steel right angle valve
- 1 1/2" diameter
- Electropneumatic
- Viton O-ring sealed bonnet
- Bellows sealed stem
- Foreline Valve
- Stainless steel right angle valve
- 3/8" diameter
- Electropneumatic
- Viton O-ring sealed bonnet
- Bellows sealed stem
- Dimensions of whole system
- 72" high x 72" wide x 30" deep
- Air
- 80 psig minimum
- 1/4 NPT
- Power
- 208-240 VAC
- 3 phase
- 60 Amp
- Individual pump and accessory breakers