Nordson MARCH C-Series Plasma Treatment System

Contact us for price. The Nordson MARCH C-Series plasma treatment system is used for a wide variety of applications in the medical and life science device manufacturing industries, and for large-scale industrial plasma treatment applications. The flexible configuration capability has proven to be a key factor in applications for surface treatment of plastic components. Parts can be placed in the plasma chamber on shelves, hanging from racks, or for small pieces, placed in a rotary tumbling drum.

The MPS Plasma System is comprised of eight major units. These are:

Vacuum Chamber

The vacuum chamber is a 36x38x48 inch inside dimension aluminum holding container in which the actual plasma process takes place. The chamber’s patented design is specially designed to enhance uniformity by keeping the flow of gases continuous and constant. The chamber is made up of four major parts that are described below.

Electrodes - The electrodes are the paired aluminum assemblies located inside the chamber. During the plasma cycle, these assemblies are excited by the RF generator (see 2.2.7 RF Power Supply), creating the actual plasma used to treat the products.

Purge Inlet Port - The purge inlet port is a high-pressure feed located on the side of the chamber. At the end of the process, it removes residual reactant gases from the chamber before breaking vacuum.

Vacuum Break - The vacuum break allows the chamber to return to atmospheric pressure after the completion of a plasma cycle. The chamber can then be opened and the products removed.

Chamber Door Assembly - The door assembly allows the chamber to be accessed.

Manifold Unit

The manifold contains all the inlet and exhaust equipment to vent gases to and from the chamber. This allows a periodic reversal of flow of gases through the chamber during the process cycle, insuring uniformity in the finished product. In some applications, the process gas is conducted to the center of the chamber by special manifolds. In this case, the right and left inlets and exhausts are all open simultaneously during process.

Right and Left Gas Inlets - The right and left gas inlets are on/off valves that allow the mixed gases to flow into the chamber. They are located on the vacuum piping on both sides of the chamber.

Right and Left Exhaust Valves - The right and left exhaust valves are located on the manifolds on both sides of the chamber. The valves are opened to allow the gases to be evacuated from the chamber.

Vacuum Pump

The stock vacuum pump is a Stokes 212 oil sealed rotary piston pump mechanical pump that removes gases from the chamber, insuring a continuous flow. We can upgrade to an Edwards dry pump. The vacuum pump requires nitrogen ballasting while it is running in order to purify the oil and minimize the buildup of corrosive acids and moisture. The waste gases and reaction products created during the plasma process are exhausted from the pump through a PVC 40 scheduled connection.

Blower

The stock blower is a Stokes 622 that assists the vacuum pump to produce faster pump down time.

Power Distribution Box

The power distribution box is mounted on the frame below the vacuum chamber. It contains the motor starters and overload heaters for the pump and blower. It also contains the primary power disconnect, the OPTO digital I/O board and relays used in the process and interlock circuits. The handle on the door of the box operates the primary power disconnect and is also used to open the door. Mounted on the door are the PUMP ON-OFF and BLOWER ON-OFF push-buttons.

Mass Flow Controllers

The mass flow controllers regulate the flow of gas into the chamber.

RF Power Supply

The stock power supply is an Advanced Energy PE II 10K, supplying RF energy to the electrodes. Various RF power supplies can be used ranging from 300 to 20,000 watts.

Modular OPTO Interface System

The factory supports what they call an OPTO Interface System, which monitors machine operation and passes computer commands/control to and from the mechanical systems.

P²CIM

The factory supports what they call a P²CIM system consists of the following equipment:

A state-of-the-art computer system complete with a CD ROM drive, hard disk drive, printer and all the necessary software to operate the peripheral equipment of the system.

Uninteruptable power supply and interface board assemblies.

A line conditioner for 115 VAC to protect the computer equipment from power transients.

Operation

Here is an overview of the system during an operational cycle, starting from the initial conditions prior to a cycle to final shutdown.

The Vacuum Pump is running.

The Nitrogen Ballast Valve is open.

The Right and Left Exhaust Valves are open.

Air in the chamber is evacuated through exhaust ports by the vacuum pump until the pressure is at or below the minimum pressure.

At minimum pressure, the Right Exhaust closes, the Left Exhaust remains open, but with central inlet manifolding both exhausts remain open (both inlets open in the next step).

The Right Gas Inlet opens and gases begin to flow.

When the pressure reaches the desired level, the RF Power Supply activates, and energy is applied to the Electrodes in the chamber. The gases are ionized, and the resulting plasma floods the surface and holes of the products.

Active species are produced in the plasma and diffused throughout the chamber. The new compounds formed by the reactants are continually evacuated through the manifold by the Vacuum Pump. Particulates can be removed from the pump oil by an optional filter system.

After an amount of time specified in the parameters (gas cycle time), the chamber’s Left Exhaust and Right Inlet Valves close and the Right Exhaust and Left Inlet Valves open. The gases are now drawn through the chamber in the opposite direction by the pull of the vacuum pump. With central inlet manifolding, all inlets and exhausts remain open during processing.

This cycle is reversed at each interval, as selected above. The flow alternates so that the gases flow back and forth, over and through the suspended products, providing uniformity as the final results.

The RF Power Supply deactivates.

When the process is completed, the Gas Inlet Valves close and the Exhaust Valves open (or stay open).

The Purge Valve opens for a period of one second, venting purge gas into the chamber. As the chamber continues to be evacuated, this cycle is repeated a number of times, thus flushing the chamber.

After the purge is completed, the chamber is pumped down to minimum pressure.

All valves close and the Vacuum Break Valve opens, letting air into the chamber.

The chamber door is opened and the products are removed from the chamber. New products are then loaded for continued processing.

Digital Manuals

Nordson MARCH C-Series Technical Manual