Novellus Concept 2 8" CVD-W System
Call for price. Novellus Concept 2 Dual Altus mainframe 8" CVD-W system.
- Digital Dynamics IOC EPROM ver. 4.1
- QNX version 3.20 system controller
- DEC Klockner-Moeller power rack
- Ergonomic cassette loader for DLCM-S
- Brooks MTR-5 robot type 2 (DLCM-S) w/ animatics controller
- 200mm wafer indexer with right and left indexer drives
- Right and left loadlock chamber assemblies
- 2 Novellus Concept 2/Dual Altus CVD-W deposition chambers, serial #'s DLCM0010 and 95-49-5099
- Optical endpoint detection
- Gas box: part # 02-024316-00
- Brooks 5964 mass flow controllers: Silane 50 SCCM, Tungsten Hexafluoride 750 SCM, C2F6 2 SLM, Hydrogen 20 SLM, Argon 2 SLM, Argon 10 SLM, Argon 20 SLM, Nitrogen 10 SLM, Oxygen 2 SLM
- Eflow gas purge panel
- MKS 100 Torr, non-heated CE mark manometers
- SiH4 exhausted enclosure
- Anafaze temperature controller, EPROM ver. 2.33
- MOER edge exclusion ring compatible
- Sapphire viewport windows
- Trazar AMU2-1 matching network
- ENI OEM 25A-01 and 28B-01 generator kit, CE mark
- AC control rack, module controller P100/16 Meg
- 2 BOC Edwards QDP80-QMB-1200 pumps
- Veriflo valves
- 24 kW watlow exhaust mantle heat system
