Refurbished Technics PE-IIA & PE-500-II
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As well as the PE-IIA we have available both the Technics PE-500-II and the Mercator LF-5 plasma system.
Digital Manuals
Technics PE-IIA
The PE-IIA is a basic system and is intended for the use of etching (isotropically) dielectrics, cleaning and ashing. It has a 16" anodized aluminum chamber with 2 channels of mass flow control and 40 kHz power supply (625 Watts). It includes an 11 CFM direct drive corrosive series mechanical pump with Fomblin oil and all connection fittings (including one 1 �" x 40" long convoluted bellows with KF-40 flanges on each end). This system will accept up to six 4" wafers and controls the temperature of the upper electrode to ambient by way of water cooling. This system comes with 2 each, 0-100 SCCM range (unless specified differently) channels of mass flow (automatic flow controllers). This is a table top system and the upper electrode is driven. It includes:
- Chamber re-annodized as new
- Host computer control (see computer software/hardware description)
- Advanced Energy PE-1000 625 Watt low frequency power supply (40 kHz) driving the upper electrode
- Capacitance monometer (10 Torr head)
- 2 mass flow controllers
- Mechanical pump, corrosive series, 11 CFM (w/ fomblin oil and all necessary fittings for complete installation)
- KF-40 convoluted bellows (for connecting pump to system)
- Facilities works to be carried out by customer according to the system specifications (see facilities drawing)
- Legal copy of Windows NT 4.0 Disk Operating System
- System Manual (notebook form as well as on CD)
- Operational software written in Microsoft Visual Basic
- Intelligent Instruments notebook manual (computer I/O Cards)
The PETS PE-IIA is based on an upper electrode (water cooled) and upper gas entry ring design. This system design allows for temperature control (as long as a closed loop temperature controlled re-circulator is installed otherwise it is ambient temperature) of the upper electrode and baseplate (chiller is not included).
This system will be warranted for six months, including parts and labor from the day of shipment.
Training
One day of training and/or commissioning is included in this quote (one day total that can be used for training or commissioning). There are several options available if needed for your process.
Options
- Level 1 spares kit $921.15
- Additional AFC's $1,500.00
Included is a copy of each of the following:
- PE system data sheet (which also includes other system options)
- Facilities drawing - S12-0627 (which specifies all facility requirements)
- Process information
Technics Micro-Stripper Series 220
Reactive Ion Etching System
- 8 5/8" dia., active work area platen, 304 stainless steel, water cooled with ceramic insulator
- 11 7/8" I.D. stainless steel chamber
- Mechanical pump (min. 11 CFM, w/ fomblin oil and all connecting fittings)
- Computer controlled with all software and licenses (see computer and software data sheet)
- ±5% uniformity guarantee (across the wafer)
- 4 mass flow controllers (100 SCCM unless specified)
- 40 kHz power supply (500 Watt) (air or water cooled)
Software
The operating software is built with Microsoft Visual Basic and is used to interface the computer to the physical hardware and to provide a visual interface to the tool for the interactive manual and automatic modes of operation. The operating software works on the Microsoft Windows NT platform. Excel from Microsoft can be used to manipulate any datalogging files for presentation purposes. It is not absolutely necessary, however (and therefore is not provided), as Microsoft Notepad can display the datalog (comma delineated) files and write or edit recipe files.
The manual mode of operation is mainly intended for R & D activities and system maintenance. In this mode, the operator interacts with the tool by "clicking" on the switch icons and/or "dragging" the indicator of the slider bar icons with the mouse.
The switch icons are linked to hardware in the tool which is "binary" in nature. Included in this class of hardware are valves, heaters and the RF generator enable controls.
The slider icons are linked to hardware in the tool which is "analog" in nature. Included in this class of hardware are the set-points of the mass flow controllers and the RF generator set-point.
The automatic mode of operation is identical to the manual mode except that the actions taken are entered into a Notepad Recipe (.rcp) file in advance of actual operation. While the automatic mode is active, screen interactions with the switches and sliders will have no effect on the hardware.
Computer Hardware
The computer hardware is a PC compatible powered by a 500 MHz Intel Pentium III processor and is housed in a mini-tower cabinet. It comes with 128 megRAM and a video card with 8 megRAM. There is a 3½" (1.44 mByte) floppy drive, a 40x CD Rom drive and a 6.4 Gbyte hard drive to go along with the keyboard, mouse and 17" (16" viewable) monitor.
The I/O cards that are being used are sourced from Intelligent Instruments (a Burr-Brown Company) and utilize the 3 ISA slots available on the mother board. The video card utilizes a PCI slot.
NOTE: If a floor model system is ordered, then the above computer hardware will be housed in an industrial computer cabinet and be mounted in a standard 19" rack mounting instead of using the mini-tower cabinet!
RIE System Options
- Turbo pump, controller and hi-vac valve (with cabinet option only!) add $14,000
- Down stream pressure control add $5,000
- Scrubber (pvc, water recirculation type) add $5,000
- Oil filtration (additional fomblin oil supplied) add $5,000
- Manufacturing system into floor model (this includes installing computer into an industrial cabinet for rack mounting- see picture above) add $6,500
- Additional channels of mass flow (maximum of 8, system comes with either 2 or 4) add $4,000 each
- Cryo pump, compressor and hi-vac valve (with cabinet option only!) add $14,000
- Power distribution module (all table top systems are 110 vac. This option requires 208 vac, 3 phase, 30 amps and then distributes power to computer, system, pump and is totally interlocked) add $2,500
This system will be warranted for six months, including parts and labor from the day of shipment.
Training
One day of training and/or commissioning is included in this quote (one day total that can be used for training or commissioning). There are several options available if needed for your process.
Included is a copy of each of the following:
- PE system data sheet (which also includes other system options)
- Facilities drawing (which specifies all facility requirements)
- Process information