Temescal FCE-2500 Fast-Cycle Evaporation System
Temescal FCE-2500 Fast-Cycle Evaporation System
The Temescal FCE-2500 Fast-Cycle Evaporation System is a clean room compatible system, with a load-lock system and fully automated or manual touch-screen control. The system combines high-throughput capability with lift-off compatibility. It can be configured for either freestanding or through-the-wall clean room installation, and supports numerous combinations of deposition sources, substrate fixturing, and substrate heating and cleaning devices. The recipes were removed with the hard drive. This is being sold as pictured.
System rack includes:
- Deposition Controller
- Temescal Simba 2
- Temescal HV & Gun Control
- Temescal Programmable Sweep
- CTI On-Board 8
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Dimensions | |
|---|---|
| Vacuum cubicle | |
| Width | 41 in (1,054 mm) |
| Depth | 66 in (1,680 mm) |
| Height | 81 in (2,060 mm) |
| Weight | 3,300 lbs (1,500 kg) |
| Vacuum product chamber | |
| Width | 28 in (1,054 mm) |
| Depth | 28 in (1,680 mm) |
| Height | 18 in (2,060 mm) |
| Volume | 231 liters |
| Vacuum source chamber | |
| Diameter | 18 in (457 mm) |
| Volume | 169 liters |
| Control cabinet | |
| Width | 24 in (610 mm) |
| Depth | 35.5 in (902 mm) |
| Height | 79.5 in (2,019 mm) |
| Weight | 800 lbs (363 kg) |
| Power supply cabinet | |
| Width | 25.3 in (643 mm) |
| Depth | 27 in (686 mm) |
| Height | 72 in (1,828 mm) |
| Weight | 1,100 lbs (500 kg) |
| Power distribution box (wall mounted) | |
| Width | 31.5 in (800 mm) |
| Depth | 12 in (305 mm) |
| Height | 39.5 in (1,004 mm) |
| Weight | 176 lbs (80 kg) 208-240 VAC systems 300 lbs (136 kg) 380+ VAC systems |
| Facility Requirements | |
| Environment | |
| Ambient air temperature | 55°F to 90°F (12°C to 32°C) |
| Relative humidity | 50% maximum |
| Cold water | 100 pisg (6.89 bar) maximum inlet pressure 50 psig (3.45 bar) minimum delta pressure 68°F (20°C) maximum inlet temperature |
| Flow rate requirements | |
| Basic system | 6.0 to 9.0 gpm (22.7 to 34.1 l/min) |
| Each source | 3.0 to 5.0 gpm (11.4 to 18.9 l/min) |
| Each crystal monitor | 0.5 gpm (1.89 l/min) |
| PC compressor | 2.75 gpm (10.4 l/min) |
| SC compressor | 2.5 gpm (9.46 l/min) |
| Hot water (optional) | 5 gpm (18.9 l/min) 90 psig (6.21 bar) maximum inlet pressure 50 psig (3.44 bar) minimum delta pressure 140°F (60°C) approximate temperature |
| Vent gas (for process and/or purge) | Clean Dry Air (CDA) or Nitrogen (N2) 90 to 120 psig (6.21-8.27 bar) |
| Pneumatic air (for valve activation) | 90 to 120 psig (6.21 to 8.27 bar) |
| Helium | One bottle 99.999% pure |
| Electrical Power | |
| Drop #1 | |
| Main system | 200 / 220 VAC, 60 Hz, 3-phase 5-wire wye, 150A or 380 / 415 VAC 3-phase 5-wire wye, 100A |
| Additional requirements for options | |
| Substrate heat | 8 kVA |
| Each resistance source | 5 kVA |
| Roots-type blower | 1.5 to 4 kVA |
| Ion beam source | 4 kVA |
| Drop #2 | |
| Simba 2® power supply | 208-240 VAC, 50/60 Hz, 3-phase 4-wire delta, 90A or 380-415 VAC, 50/60 Hz, 3-phase 5-wire wye, 70A |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.
Temescal FCE-2500 Fast-Cycle Evaporation System
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