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Temescal FCE-2500 Fast-Cycle Evaporation System

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Temescal FCE-2500 Fast-Cycle Evaporation System
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Temescal FCE-2500 Fast-Cycle Evaporation System

The Temescal FCE-2500 Fast-Cycle Evaporation System is a clean room compatible system, with a load-lock system and fully automated or manual touch-screen control. The system combines high-throughput capability with lift-off compatibility. It can be configured for either freestanding or through-the-wall clean room installation, and supports numerous combinations of deposition sources, substrate fixturing, and substrate heating and cleaning devices. The recipes were removed with the hard drive. This is being sold as pictured.

  

       

     

        

    

System rack includes:

  • Deposition Controller
  • Temescal Simba 2
  • Temescal HV & Gun Control
  • Temescal Programmable Sweep
  • CTI On-Board 8

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Dimensions  
    Vacuum cubicle  
        Width 41 in (1,054 mm)
        Depth 66 in (1,680 mm)
        Height 81 in (2,060 mm)
        Weight 3,300 lbs (1,500 kg)
    Vacuum product chamber  
        Width 28 in (1,054 mm)
        Depth 28 in (1,680 mm)
        Height 18 in (2,060 mm)
        Volume 231 liters
    Vacuum source chamber  
        Diameter 18 in (457 mm)
        Volume 169 liters
    Control cabinet  
        Width 24 in (610 mm)
        Depth 35.5 in (902 mm)
        Height 79.5 in (2,019 mm)
        Weight 800 lbs (363 kg)
    Power supply cabinet  
        Width 25.3 in (643 mm)
        Depth 27 in (686 mm)
        Height 72 in (1,828 mm)
        Weight 1,100 lbs (500 kg)
    Power distribution box (wall mounted)  
        Width 31.5 in (800 mm)
        Depth 12 in (305 mm)
        Height 39.5 in (1,004 mm)
        Weight 176 lbs (80 kg) 208-240 VAC systems
300 lbs (136 kg) 380+ VAC systems
Facility Requirements  
    Environment  
        Ambient air temperature 55°F to 90°F (12°C to 32°C)
        Relative humidity 50% maximum
        Cold water 100 pisg (6.89 bar) maximum inlet pressure
50 psig (3.45 bar) minimum delta pressure
68°F (20°C) maximum inlet temperature
        Flow rate requirements  
            Basic system 6.0 to 9.0 gpm (22.7 to 34.1 l/min)
            Each source 3.0 to 5.0 gpm (11.4 to 18.9 l/min)
            Each crystal monitor 0.5 gpm (1.89 l/min)
            PC compressor 2.75 gpm (10.4 l/min)
            SC compressor 2.5 gpm (9.46 l/min)
        Hot water (optional) 5 gpm (18.9 l/min)
90 psig (6.21 bar) maximum inlet pressure
50 psig (3.44 bar) minimum delta pressure
140°F (60°C) approximate temperature
        Vent gas (for process and/or purge)     Clean Dry Air (CDA) or Nitrogen (N2) 90 to 120 psig (6.21-8.27 bar)
        Pneumatic air (for valve activation) 90 to 120 psig (6.21 to 8.27 bar)
        Helium One bottle 99.999% pure
Electrical Power  
    Drop #1  
        Main system 200 / 220 VAC, 60 Hz, 3-phase 5-wire wye, 150A
or 380 / 415 VAC 3-phase 5-wire wye, 100A
        Additional requirements for options  
             Substrate heat 8 kVA
             Each resistance source 5 kVA
             Roots-type blower 1.5 to 4 kVA
             Ion beam source 4 kVA
    Drop #2  
        Simba 2® power supply 208-240 VAC, 50/60 Hz, 3-phase 4-wire delta, 90A
or 380-415 VAC, 50/60 Hz, 3-phase 5-wire wye, 70A

Request for Quote

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

Temescal FCE-2500 Fast-Cycle Evaporation System

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