VAT Wafer Transfer Vacuum Valves - REPAIR SERVICE

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RMA

 

Wafer Transfer Vacuum Valve Repair Service    
Series     SEMI Valve Description
02/03 Transfer valve / insert MONOVAT     for 200 / 300 / 450 mm wafer sizes
04/05     Transfer valve / insert L-VAT for corrosive semiconductor processes
075 Atmospheric door L-VAT for loadlock applications
 
Series     FPD & PV Valve Description
024 Large transfer valve MONOVAT for FPD and PV production systems
060 Transfer valve XL-VAT for FPD production systems
066 Transfer valve / insert / door SolVAT     for PV production systems
075/8     Large door L-VAT for FPD and PV production systems

 

We stock and provide repair service for VAT wafer transfer valves.

Pneumatic Actuator: 02209-BA24, 02209-BE24, 02209-AA24, 02209-AE24, 02210-BA24, 02210-BE24, 02210-AA24, 02210-AE24, 02212-BA24, 02212-BE24, 02212-AA24, 02212-AE24, 02213-BA24, 02213-BE24, 02213-AA24, 02213-AE24, 03209-CA24, 03209-CE24, 03210-CA24, 03210-CE24, 03212-CA24, 03212-CE24, 03213-CA24, 03213-CE24, 04110-BA24, 04112-BA24, 05110-LA24, 05112-LA24, 07510-UA24, 07510-VA24, 07512-UA24, 07512-VA24, 07510-UE24, 07510-VE24, 07512-UE24, 07512-VE24