| ASM 110 Specifications |
|---|
| Maximum operating pressure of the analysis cell | 10-4 mbar |
Pumping speed for He
in front of the analysis cell | 30 l/s |
| at the inlet valve | 8 l/s |
| Intrinsic sensitivity of the analysis cell | 3 , 5.10-4 |
| Variation of sensitivity as a function of pressure between 10-6 and 10-4 mbar | 40% maximum |
| smallest detectable signal | 2.10-11 atm.cm3/s He |
| Leak rate detection range: |
| direct | 2.10-11 to 1.10-5 atm.cm3/s He |
| closed loop circuit | 1.10-5 to 3.10-1 atm.cm3/s He |
| Pirani gauge detection | 1 to 100 atm.cm3/s He |
| Response time |
| scale 10.10-10 | 1.5 s |
| scale 3.10-9 | 1 s |
| scale 10.10-9 - 10.10-6 | 0 , 5 s |
| Filament protection (triode) | off at 2.10-4 mbar |
| Turbomolecular pump protection (Pirani gauge) | Closing of the safety inlet valve at 5.10-2 mbar |
| Audio signal | adjustable on the whole range |
| Air roughing pumping speed at inlet port | 1 l/s |
