Vacuum Pump Oil
Inland Mechanical Pump Fluids
 | | Product | 1 gallon | 5 gal | 55 gal |
|---|
| Inland 19 | $31 | $102 | $685 | | Invoil 20 | $97 | $370 | $2,532 | | Inland 21 | $35 | $127 | $803 | | Inland 23 | $35 | $127 | $803 | | Inland 33 | $46 | $166 | $1,357 | | Inland 35 | $52 | $191 | $1,438 | | Inland 41 | $42 | $119 | $903 | | Inland 43 | $29 | $107 | $633 | | Inland 45 | $136 | $533 | $3,529 | | Inland 45Z | $152 | $601 | $3,630 | | Inland 77 | $33 | $111 | $679 | | Inland 87 | $33 | $116 | $731 | | Inland 97 | $33 | $116 | $731 | | Inland FF-10 | $20 | $63 | $483 | | Inland FF-45 | $38 | $119 | $575 | | Inland FF-TW | $22 | $66 | $518 | | Inland TW | $93 | $366 | $2,933 | | Inland HVTW | $111 | $422 | $3,070 | | Halovac 100 | $2,175 | $9,980 | - | | Halovac 125 | $1,894 | $9,980 | - | | Halovac 190 | $2,055 | $9,500 | - |
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We have found that when the proper oil is used that fits the application, the following benefits are clear:
- Reduced pumping times
- Longer oil service life
- Less total maintenance cost
- Higher yields on reclamation of diffusion pump fluids
Inland's mechanical pump fluids are vacuum distilled paraffinic hydrocarbons containing no aromatics or viscosity improvers that are lost during filtration. Compared to undistilled vacuum pump fluids, Inland's pure vacuum distilled mechanical pump fluids provide excellent lubrication, oxidation resistance, lower vapor pressure, and four to 10 times longer fluid life. Inland's stringent quality control procedures guarantee a product that is recommended by major vacuum pump manufacturers. Inland also had a line of Fomblin PFPE fluids and Halovac inert vacuum pump fluids.
Inland TW
Description
- Longest lasting hydrocarbon
- Ideal for corrosive service
- Replaces fomblin and krytox in many applications
- Low vapor pressure
- USP grade
- Recommended for mechanical and piston pumps
- Inland TW MSDS
Application
- Nitride deposition ion
- LPCVD
- Plasma etching
- Ion implant
Inland 19
Description
- Ideal for non-corrosive
- Hydrocarbon fluid
- Molecularly distilled
- Excellent vapor pressure capabilities
- Reduced backstreaming
- Much longer fluid life vs. refinery products
- Inland 19 MSDS
Inland 25
Application
- Mass spectrometers
- Electron microscopes
- Thin film sputtering
- UHV systems
- Freeze dry systems
Inland 77, 87 & 97
Description
- General purpose hydrocarbon fluids
- High viscosity
- Excellent sealing and lubrication properties
- Recommended for rotary vane piston pumps
- Non-corrosive applications
- Inland 77 MSDS
Application
- Furnaces
- EB welders
- Booster
- Metallization
Inland 45
Inland FF10
Technical Data
| # | Vapor Pressure @ 25°C | Boiling Point @ .01 Torr | Viscosity @ 40°C | Pour Point | Flash Point | Fire Point | Density @ 25°C |
|---|
| | torr | °C | cSt | °C | °C | °C | g/mL |
|---|
| TW | <1 x 10-6 | 158 | 65 | -12 | 243 | 270 | .86 |
| 19 | 1 x 10-5 | 112 | 55 | -15 | 213 | 244 | .86 |
| 77 | 5 x 10-5 | 138 | 100 | -9 | 257 | 291 | .87 |
| 87 | 1 x 10-4 | 100 | 175 | -29 | 210 | >240 | .90 |
| 97 | 4 x 10-4 | 158 | 207 | -12 | 235 | 277 | .87 |
Fomblin
| Product | 1 kg | 2 kg | 8 kg |
|---|
| Y06/6 | $195 | $390 | $1,560 |
| Y14/6 | $195 | $390 | $1,560 |
| Y15/6 | $195 | $390 | $1,560 |
| Y25/6 | $195 | $390 | $1,560 |
Fomblin YL-VAC Inert Vacuum Pump Fluids
Description
- Non-flammable
- Safe for oxygen service
- Good radiation stability
- Chemical inertness
- Resists attack by corrosive gases
- Low vapor pressure
- Extended service life
- High dielectric strength
Application
- Semiconductor
- Chemical pumping (lewis acids)
- LPCVD
- Reactive ion etch
- Plasma etching
Technical Data
| # | Vapor Pressure @ 20°C | Boiling Range @ 760 Torr | Viscosity @ 20°C | Pour Point | Flash Point | Fire Point | Density @ 20°C |
|---|
| | torr | °C | cSt | °C | °C | °C | g/mL |
|---|
| Y 06/6 | 3 x 10-6 | >250 | 64 | -50 | none | none | 1.88 |
| Y 14/6 | 2 x 10-7 | >250 | 148 | -45 | none | none | 1.89 |
| Y 16/6 | 2 x 10-6 | >250 | 168 | -45 | none | none | 1.89 |
| Y 25/6 | 4 x 10-8 | >250 | 276 | -35 | none | none | 1.90 |
Inland Arctic Oil
| Product | 5 gallon Pal |
|---|
| Mobil Arctic SHC-224 | $269 |