Vacuum Pump Oil

Inland Mechanical Pump Fluids

Product	1 gallon	5 gal	55 gal
Inland 19	$31	$102	$685
Invoil 20	$97	$370	$2,532
Inland 21	$35	$127	$803
Inland 23	$35	$127	$803
Inland 33	$46	$166	$1,357
Inland 35	$52	$191	$1,438
Inland 41	$42	$119	$903
Inland 43	$29	$107	$633
Inland 45	$136	$533	$3,529
Inland 45Z	$152	$601	$3,630
Inland 77	$33	$111	$679
Inland 87	$33	$116	$731
Inland 97	$33	$116	$731
Inland FF-10	$20	$63	$483
Inland FF-45	$38	$119	$575
Inland FF-TW	$22	$66	$518
Inland TW	$93	$366	$2,933
Inland HVTW	$111	$422	$3,070
Halovac 100	$2,175	$9,980	-
Halovac 125	$1,894	$9,980	-
Halovac 190	$2,055	$9,500	-

We have found that when the proper oil is used that fits the application, the following benefits are clear:

Reduced pumping times
Longer oil service life
Less total maintenance cost
Higher yields on reclamation of diffusion pump fluids

Inland's mechanical pump fluids are vacuum distilled paraffinic hydrocarbons containing no aromatics or viscosity improvers that are lost during filtration. Compared to undistilled vacuum pump fluids, Inland's pure vacuum distilled mechanical pump fluids provide excellent lubrication, oxidation resistance, lower vapor pressure, and four to 10 times longer fluid life. Inland's stringent quality control procedures guarantee a product that is recommended by major vacuum pump manufacturers. Inland also had a line of Fomblin PFPE fluids and Halovac inert vacuum pump fluids.

Inland TW

Description

Longest lasting hydrocarbon
Ideal for corrosive service
Replaces fomblin and krytox in many applications
Low vapor pressure
USP grade
Recommended for mechanical and piston pumps
Inland TW MSDS

Application

Nitride deposition ion
LPCVD
Plasma etching
Ion implant

Inland 19

Description

Ideal for non-corrosive
Hydrocarbon fluid
Molecularly distilled
Excellent vapor pressure capabilities
Reduced backstreaming
Much longer fluid life vs. refinery products
Inland 19 MSDS

Inland 25

Inland 25 MSDS

Application

Mass spectrometers
Electron microscopes
Thin film sputtering
UHV systems
Freeze dry systems

Inland 77, 87 & 97

Description

General purpose hydrocarbon fluids
High viscosity
Excellent sealing and lubrication properties
Recommended for rotary vane piston pumps
Non-corrosive applications
Inland 77 MSDS

Application

Furnaces
EB welders
Booster
Metallization

Inland 45

Inland 45 MSDS

Inland FF10

Inland FF10 MSDS

Technical Data

#	Vapor Pressure @ 25°C	Boiling Point @ .01 Torr	Viscosity @ 40°C	Pour Point	Flash Point	Fire Point	Density @ 25°C
	torr	°C	cSt	°C	°C	°C	g/mL
TW	<1 x 10^-6	158	65	-12	243	270	.86
19	1 x 10^-5	112	55	-15	213	244	.86
77	5 x 10^-5	138	100	-9	257	291	.87
87	1 x 10^-4	100	175	-29	210	>240	.90
97	4 x 10^-4	158	207	-12	235	277	.87

Fomblin

Product	1 kg	2 kg	8 kg
Y06/6	$195	$390	$1,560
Y14/6	$195	$390	$1,560
Y15/6	$195	$390	$1,560
Y25/6	$195	$390	$1,560

Fomblin YL-VAC Inert Vacuum Pump Fluids

Description

Non-flammable
Safe for oxygen service
Good radiation stability
Chemical inertness
Resists attack by corrosive gases
Low vapor pressure
Extended service life
High dielectric strength

Application

Semiconductor
Chemical pumping (lewis acids)
LPCVD
Reactive ion etch
Plasma etching

Technical Data

#	Vapor Pressure @ 20°C	Boiling Range @ 760 Torr	Viscosity @ 20°C	Pour Point	Flash Point	Fire Point	Density @ 20°C
	torr	°C	cSt	°C	°C	°C	g/mL
Y 06/6	3 x 10^-6	>250	64	-50	none	none	1.88
Y 14/6	2 x 10^-7	>250	148	-45	none	none	1.89
Y 16/6	2 x 10^-6	>250	168	-45	none	none	1.89
Y 25/6	4 x 10^-8	>250	276	-35	none	none	1.90

Inland Arctic Oil

Product	5 gallon Pal
Mobil Arctic SHC-224	$169