Rebuilt IPUP Dry Pumps
The IPUP (Integrated Point of Use Pump) is designed for integration on semiconductor process tools and cleanroom operation. Replacing larger remote dry pumps located away from the process tools.
Features of the pumps are compactness, cleanliness, high pumping speed, quiet operation, energy efficiency, interchangeability and design for integration.
| Specification | A100 | A300 |
|---|
| Pumping speed (cfm) | 56 | 190 |
| Ultimate pressure (mtorr) | 5 | 4.5 |
| Power consumption (kW) | 1.5 | 1.5 |
| Noise (dBA) | 58 | 58 |
| Vibration (µ) | .3 | .5 |
| Inlet/exhaust (KF) | 50/25 | 63/25 |
| Weight (lbs) | 228 | 363 |
Digital Manuals
- A100 IPUP instruction manual.
