Rebuilt Edwards iGX, iH & iF Dry Pumps

iL iH
ModelcfmhpkWRebuilt
L704932.2ask
iL70N4932.2ask
iH80615.03.5ask
iGX100L62--ask
iGX100M62--ask
iGX6/100N365--ask
iL600N3538.76.1ask
iH6003538.76.1ask
iH10005888.76.1ask
iH18001,060107ask
iF18001,060107ask
iF30K2000--ask

Edwards iH and iF system dry pumps are designed specifically for difficult semiconductor processes that produce unwanted by-products or corrosion. The Edwards iL model is an economy version which cannot tolerate as much process contamination. We also offer repair service.

iH & iF Technical Data

Dry PumpiH80iH600iH1000iH1800iF1800
Source Frequency60 Hz
Peak Speed
(m3h-1)1006001,0001,800
cfm613535881,060
Ultimate Vacuum
mbar1 x 10-27 x 10-41 x 10-3
Torr7.5 x 10-35.3 x 10-47.5 x 10-4
Typical/Max
N2 flow (slm)
44/6059/
Motor power (kW)3.56.17
Input @ vacuum (kW)2.73.43.84.1
Inlet ConnectionISO 63ISO 100ISO 160
Outlet ConnectionNW 40
Weight (lbs)5259159451,1001,285
Digital Manuals

What you need, when you need it!


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