Rebuilt Edwards iGX, iH & iF Dry Pumps
Edwards iH and iF system dry pumps are designed specifically for difficult semiconductor processes that produce unwanted by-products or corrosion. The Edwards iL model is an economy version which cannot tolerate as much process contamination. We also offer repair service.
- Gas Module: controls nitrogen purges and monitors exhaust pressure.
- Dry Pump Control Module: controls the gas module, interprets signals from thermocouples and other sensors, and activates warning and alarms when necessary.
- Electrics Module: used for low voltage power requirements.
- Dry Pump Display Terminal: hand-held module (game boy) normally kept above the electronics enclosure which allows simple local monitoring and control.
iH & iF Technical Data
| Dry Pump | iH80 | iH600 | iH1000 | iH1800 | iF1800 |
|---|
| Source Frequency | 60 Hz |
| Peak Speed |
| (m3h-1) | 100 | 600 | 1,000 | 1,800 |
| cfm | 61 | 353 | 588 | 1,060 |
| Ultimate Vacuum |
| mbar | 1 x 10-2 | 7 x 10-4 | 1 x 10-3 |
| Torr | 7.5 x 10-3 | 5.3 x 10-4 | 7.5 x 10-4 |
Typical/Max
N2 flow (slm) | 44/60 | 59/ |
| Motor power (kW) | 3.5 | 6.1 | 7 |
| Input @ vacuum (kW) | 2.7 | 3.4 | 3.8 | 4.1 |
| Inlet Connection | ISO 63 | ISO 100 | ISO 160 |
| Outlet Connection | NW 40 |
| Weight (lbs) | 525 | 915 | 945 | 1,100 | 1,285 |
Digital Manuals
- iH dry pump instruction manual.
- iL dry pump instruction manual.
