Rebuilt Edwards iH & iL Dry Pumps
Edwards iH and iL system dry pumps are designed specifically for difficult semiconductor processes that produce unwanted by-products or corrosion. The Edwards iL model is an economy version which cannot tolerate as much process contamination.
- Gas Module: controls nitrogen purges and monitors exhaust pressure.
- Dry Pump Control Module: controls the gas module, interprets signals from thermocouples and other sensors, and activates warning and alarms when necessary.
- Electrics Module: used for low voltage power requirements.
- Dry Pump Display Terminal: hand-held module (game boy) normally kept above the electronics enclosure which allows simple local monitoring and control.
iH & iL Technical Data
| Dry Pump | L70 | iL70 | iH80 | iH600 |
|---|
| Source Frequency | 60 Hz |
| Peak Speed |
| (m3h-1) | 84 | 103 | 600 |
| cfm | 49 | 61 | 353 |
| Ultimate Vacuum |
| mbar | 3 x 10-2 | 1 x 10-2 | 7 x 10-4 |
| Torr | 2.3 x 10-2 | 8 x 10-3 | 5 x 10-4 |
Typical shaft-seal
N2 flow (slm) | 0 | 0/4 | 4 |
| Motor power (kW) | 2.2 | 3.5 | 6.1 |
| Input @ vacuum (kW) | 1.5 | 2.7 | 3.4 |
| Inlet Connection | ISO 63 | ISO 100 |
| Outlet Connection | NW 40 |
| Weight (kg) | 210 | 230 | 240 | 405 |
Digital Manuals
- iH dry pump instruction manual.
- iL dry pump instruction manual.
