Used EBARA Turbo Pumps
These EBARA turbomolecular pumps offer full magnetic levitation, which provides for a clean, reliable vacuum. The ET Series features a five axis magnetic bearing with two styles of rotor: high compression (ET-H) and a wide range corrosion resistant (e.g. ET-1600WS). The ET-WS pumps also offers a temperature controlled model, ET-WS-A for etching applications.
The EBARA ET-W turbo pump gives a wide pressure range and a large allowable back pressure (3 Torr) enabling simplification of foreline exhaust system. Anti corrosion models provide superior durability to all reactive gasses. The temperature controlled models provide less build-up of chemicals. We also offer repair service.
| Specifications | 300WS | 600WS | 1600WS | 2500WS |
|---|
| Flange | Inlet | VG 100 | VG 150 | VG 250 | VG 300 |
| Outlet | NW 25 | NW 40 | NW 25 | NW 25 |
| Pumping Speed | N2 (L/S) | 270 | 460 | 1,600 | 2,500 |
| Max Compression Ratio | N2 | >109 | >108 | >109 | >108 |
| H2 | 7 x 103 | 1 x 104 | 8 x 104 | 2 x 104 |
| Ultimate Pressure | Torr | <7.5 x 10-9 |
| Allowable Outlet Pressure | Pa (Torr) | 400 (3) | 266 (2) |
| Revolution Speed | RPM | 48,000 | 35,000 | 30,000 | 27,000 |
| Run-Up Time | Minutes | 6 | 8 |
| Installation Position | Any |
| Vibration Level | um 0-p | <0.01 |
| Pump Bake Out Temp. | °C | max 100 |
| Bearing System | 5-axis magnetic bearing |
| Cooling System | water |
| Cooling Water Flow Rate | L/min | >2 |
| N2 Gas Throughput for Purging | Pa-L/Sec (sccm) | 85 (50) | 169 (100) |
| Weight | kg | 17 | 13 | 13 | 17 |
