Used Shimadzu Turbo Pumps & Controllers
Magnetically Levitated
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* This Shimadzu turbo pump spins freely.
Turbo Controllers
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| Specifications | TMP-1003LM | TMP-3203LMC |
|---|---|---|
| Rotor coating | None | Coated |
| Cooling method | Water cooled | |
| Ultimate pressure (after bake out) Pa (Torr) | 10-9 order (10-11 order) | 10-8 order (10-10 order) |
| Maximum inlet pressure Pa (Torr) | 400Pa (3Torr) | 40Pa (0.3Torr) |
| Maximum outlet pressure Pa (Torr) | 665Pa (5Torr) | 270Pa (2Torr) |
| Pumping speed N2 He H2 | 1080L/s 930L/s 790L/s | 3,200L/s 3,000L/s 2,400L/s |
| Compression ratio N2 He H2 | 109 or higher 8 x 104 4 x 103 | 109 or higher 3 x 105 1 x 104 |
| Rated rotation speed | 35,000 RPM | 21,000 RPM |
| Startup time | 5 minutes | 13 minutes |
| Direction of installation | Arbitrary | |
| Baking temperature of pump inlet | 120°C or lower | |
| Vibration, measured by the Shimadzu method | Less than 0.01mm | |
| Weight | 32kg | 70kg |
| Recommended purge gas flow rate | 20 - 30 mL/min | |
| Recommended pumping speed of backing vacuum pump during gas purging | 500 L/min or higher | 1,500 L/min or higher |
| Operational ambient temperature range | 0 - 40°C | |
| Allowable magnetic flux density Radial directions Axial directions | 3mT 15mT | |
| Cooling water: Flow rate L/min. Pressure MPa (kgf/cm2) Temperature °C | 1 - 3 0.2 - 0.5 (2 - 5) 5 - 30 | 2 - 4 0.2 - 0.5 (2 - 5) 5 - 25 |
| Power supply | EI-D1003M | EI-D3203M |