MKS ENI 13.56 & 12.56 MHz Power Supplies
Notice the interface difference between the MKS ENI OEM-12A and the OEM-12B power supplies.
ACG
ENI Matching Networks & Controllers
Used Astex Match Networks
MKS ENI Matchwork Impedance Matching Networks provide tuning from 40W to 10kW and 2MHz to 40.68Mhz.
| Power Supply | 6 | 12 | 25 | 50 | 1250 | 2000 |
|---|
| Output (kW) | .600 | 1.25 | 2.50 | 5.00 | 1.25 | 2.0 |
| Power Regulation | 1% into 50 Ohms |
| Frequency Stability | 13.56 MHz ±.05% |
| Max Output (kW) | 750 | 1,250 | 2,730 | 5,000 | 1,250 | 2,000 |
| Harmonic Dist. | -55 dBc | -45 dBc | -55 dBc |
| Noise, Ripple | -30 dBc at full power |
| Line Voltage | 198-240 VAC, 1Φ, 50/60Hz |
| Connectors | Type N | HN | LC | N | HN |
| Net Weight (lbs.) | 76 | 126 | 225 | 375 | 48.5 | 77.2 |
| Water Flow (gpm) | 0.8 | 1.2 | 2.0 | 4 | 1.2 | 1.8 |
| HxWxD (inches) | 7x17x15 | 9x17x16 | 18x17x21 | 27x17x21 | 7x17x13 | 7x17x24 |
The OEM-50 models we have are: OEM-50M2 (25 pin), OEM-50N11601 (15 pin), OEM-50-01M6 (15 pin).
MKS ENI 13.56 MHz Power Supply Service
We provide repair service for the following models:
- OEM-6
- OEM-6A
- OEM-6B
- OEM-650A
- OEM-650A XL
- OEM-12
- OEM-12A
- OEM-12A XL
- OEM-12B
- OEM-12B-02
- OEM-12B-07
- OEM-12B3
- OEM-12B3-02
- OEM-1250
- OEM-25A
- OEM-25N-11481
- OEM-25N-XL
- OEM-28B
- OEM-50
- Spectrum 3kW
- Spectrum 5kW
- Spectrum 10.5kW
- Spectrum 11kW
- ACG-3
- ACG-5
- ACG-6
- ACG-10
- ACG-10B
Call for a quote. 90 day warranty service on all MKS ENI 13.56 MHz power supplies.