MKS ENI DC Power Supplies

DC Magnetron

Model	Part #	AMAT #	kW	Rebuilt
DCG-100A	DCG1M-A001200020C		5	ask
DCG-100A	DCG1M-A001100020V		5	ask
DCG-100A	DCG1R-A021200021		5	ask
DCG-100A	DCG2D-A001100020MA		5	ask
DCG-100A	DCG2D-A031100021		5	ask
DCG-100A	DCG2S-A022000010		5	ask
DCG-100A	DCG2S-A022001010		5	ask
DCG-100A	DCG2S-A122000010		5	ask
DCG-100A	DCG4M-A001101010		5	ask
DCG-100A	DC26M-Z011100010C		5	ask
DCG-100A	DCG2M-A001200020C		10	ask
DCG-200Z	DC21M-Z041300110A	0190-08279	10	ask
DCG-200A	DC22M-A041300111AL	0190-07960	20	ask
DCG-200Z	DC22M-Z041300111A	0190-07961	20	ask
DCG-200Z	DC22S-Z122000010A		20	ask
DCG-200Z	DC24M-Z041300110A	0190-08033	40	ask
DCG-200Z	DC24M-Z041300111A	0190-13302	40	ask
DCG-200E	DCG-400E-00 Optima	0190-12211	40	ask
DCG-200E	Optima KV Proto 1		40	ask

RPG

Model	kWatts	Rebuilt
RPG-50	5	ask
RPG-50	5	ask
RPG-100	10	ask

Polara

Model	kWatts	Rebuilt
Polara-260A	3	$2,800

DC Magnetron

The MKS ENI DC magnetron power supply has the same connection and cable configuration as the MDX magnetron. It can be swapped with an MDX with no other changes than the voltage taps. The DCG takes slaves as well to increase power output, which requires upgrading the master software. The MKS Optima OPT-20 is the latest in this line.

RPG

The ENI RPG is a Asymmetric bipolar pulsed DC, which contains one power module that provides up to 5kW of pulsed DC. It is designed with a multi-tap output transformer to match any load condition.

Polara

The ENI Polara 260 is a highly reliable pulsed bipolar power supply for semiconductor chip electroplating applications. Built in diagnostics and internal fail safe memory simplify maintenance requirements and increase system uptime.

MKS ENI DC Power Supply Service

We provide repair service for the following models:

DCG-100 5kW
DCG-100 10kW
DCG-200 20kW
DCG-200 30kW
DCG-200Z 40kW
RPG-50
RPG-100
Polara-260A

Call for a quote. 90 day warranty service on all MKS ENI DC power supplies.