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Agilent Varian TV 2K-G Turbo Vacuum Pump - REBUILT

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Manufacturer Part Number: 9698871
Agilent Varian TV 2K-G Turbo Vacuum Pump - REBUILT
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Agilent Varian Turbo-V 2K-G Turbomolecular Vacuum Pump - REBUILT

The Varian Turbo-V 2K-G turbo pump is a dedicated pumping system designed for the Plasma process industry. Its pumping stages and pump structure are optimized to work with very high Ar gas flows and temperatures. The 2K-G is the first pump to fully integrate both purge and vent valves into the pump casing. They are actuated directly by the integrated electronics and nothing hangs out of the pump. They are protected from external shocks and contamination, granting for maximum lifetime. View our inventory of Varian turbo pumps.

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Agilent Varian Turbo-V 2K-G

Pumping speed (w/out inlet screen)
    N2
    Ar

1,600 l/s
1,400 l/s
Compression ratio
    N2
    Ar

3 x 105
6 x 105
Base pressure w/ recommended forepump     5 x 10-8 mbar (4 x 10-8 Torr)  (According to standard DIN 28 428, the base pressure is that measured in a leak-free test dome, 48 hours after the completion of test dome bake-out, with a turbopump fitted with a ISO-250 flange and using the recommended pre-vacuum pump)
Inlet flange ISO-250F
Foreline flange KF-40 NW
Nominal rotational speed 33,000 rpm
Start up time < 7 minutes
Recommended forepump > 40 m3/h
Operating position Any
Operating ambient temperature 5°C to 40°C
Maximum flange temperature no process: 80°C
process: 50°C
Max rotor temperature 120°C
Vibration level (displacement) < 0.01 μm at inlet flange
Cooling requirements Water
Coolant water Minimum flow: 200 l/h (0.89 GPM)
Temperature: +10°C to +35°C
Pressure: 3 to 5 bar (45 to 75 psi)
Noise level < 45 dB(A) at 1 meter
Power supply
Input voltage
Input freq.
Max input power
Stand-by power
Max operating power

208 – 240 VAC
50 – 60 Hz
850 VA
30 to 35 W
400 W for Nitrogen and lighter gases
390 W for Argon
Protection fuse 2 x 8 A
Compliance with EN 55011 (Radio disturbance characteristics)
EN 61000-3-2 (Limits for harmonic current emissions)
EN 61000-3-3 (Limitation of voltage changes, voltage fluctuations and flicker)
EN 61000-6-2 and EN 61326 (Immunity for industrial environments) which recall:
EN 61000-4-2 (Electrostatic discharge phenomena)
EN 61000-4-3 (Radiated high-frequency phenomena)
EN 61000-4-4, EN 61000-4-5, EN61000-4-6 (Conducted high-frequency phenomena)
EN 61000-4-11 (Voltage fluctuation, voltage dips and short interruptions)
Installation Category II
Pollution Degree 2
Max altitude 2,000 m MSL
Power cable w/ European or NEMA plug 3 meters long (optional)
Serial communication kit RS232 cable w/ a 9-pin D type male connector and a 9- pin D type female connector, and Navigator software (optional)
Storage temperature -20°C to 70°C
Environment protection IP54
Weight 35 kg (77.16 lbs)

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Agilent Varian Turbo-V 2K-G Turbomolecular Vacuum Pump - REBUILT

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