Agilent Varian Turbo-V 81 - REBUILT
Agilent Varian Turbo-V 81-M/T Turbomolecular Vacuum Pump - REBUILT
Each turbo pump must match its controller in reference to the same class. For example, the Turbo-V 550 pump must match a V550 (stand alone, brick or PCB) controller. We also offer repair service.
The pump consists of a high frequency motor driving a turbine fitted with 9 bladed stages and 3 Macrotorr stages. The turbine rotates in an anticlockwise direction when viewed from the high vacuum flange end. The turbine is made of high-strength aluminium alloy, machined from a single block.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
Specifications | Turbo-V 81-M | Turbo-V 81-T | ||
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Pumping speed (l/s) | w/ 4.5” CF or ISO 63 N2: 77 l/s He: 65 l/s H2: 50 l/s |
w/ 2.75” CF or KF 40 N2: 50 l/s He: 56 l/s H2: 46 l/s |
w/ 4.5” CF or ISO 63 N2: 77 l/s He: 65 l/s H2: 50 l/s |
w/ 2.75” CF or KF 40 N2: 50 l/s He: 56 l/s H2: 46 l/s |
Compression ratio | N2: 3 x 108 He: 8 x 104 H2: 7 x 103 |
N2: > 7 x 106 He: 5 x 103 H2: 3 x 102 |
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Base pressure (w/ recommended forepump) | 5 x 10-10 mbar (3.8 x 10-10 Torr) | 5 x 10-9 mbar (3.8 x 10-9 Torr) | ||
Inlet flange | 4.5” O.D. CF ISO-63 2.75” O.D. CF KF-40 |
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Foreline flange | KF-16 NW | |||
Rotational speed | 1,350 Hz (max) | |||
Start-up time | < 60 seconds | |||
Recommended forepump | Mechanical: Agilent DS 42 - DS 102 Dry pump: Agilent IDP-2, IDP-3, SH-110 |
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Operating position | Any | |||
Cooling requirements | Natural air convection Forced air or water optional |
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Coolant water | flow: 10 l/h (0.05 GPM) temperature: + 15°C to + 35°C pressure: 2 to 4 bar (30 to 60 Psi) |
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Operating ambient temperature w/ natural air convection | +5°C to +25°C | |||
Operating ambient temperature w/ forced air cooling or water | +5°C to +35°C | |||
Bakeout temperature | 120°C at inlet flange max. (CF flange) 80°C at inlet flange max. (ISO flange) |
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Vibration level (displacement) | < 0.01 μm at inlet flange | |||
Noise level | ≤ 45 dB (A) at 1 meter | |||
Compliance with | UNI EN 292-1 UNI EN 292-2 EN-CENELEC 55011 IEC 1000-4-2 (ex 801-2) IEC 1000-4-3 (ex 801-3) IEC 1000-4-4 (ex 801-4) EN 61010-1 (IEC 1010-1) EN 1012-2 |
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Storage temperature | -20°C to +70°C | |||
Input | 60 VAC, three-phase 1,350 Hz (max) 50 W max |
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Lubricant | Permanent lubrication | |||
Installation category | II | |||
Pollution degree | 2 | |||
Weight kg (lbs) | ISO 63: 1.99 (4.39) KF 40: 1.96 (4.32) CF 4.5”: 2.96 (6.53) CF 2.75”: 2.77 (6.11) |
ISO 63: 1.83 (4.03) KF 40: 1.80 (3.97) CF 4.5”: 2.62 (5.78) CF 2.75”: 2.59 (5.71) |
Digital Manual - Turbo-V 81-M
Digital Manual - Turbo-V 81-T
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.
Agilent Varian Turbo-V 81-M/T Turbomolecular Vacuum Pump - REBUILT 9698901 / EX9698901 / 969-8901 Turbo-V TV 81-M ISO-63 9698902 / EX9698902 / 969-8902 Turbo-V TV 81-M KF-40 9698903 / EX9698903 / 969-8903 Turbo-V TV 81-M 4.5" CF 9698904 / EX9698904 / 969-8904 Turbo-V TV 81-M 2.75" CF 9698905 / EX9698905 / 969-8905 Turbo-V TV 81-T ISO-63 9698906 / EX9698906 / 969-8906 Turbo-V TV 81-T KF-40 9698907 / EX9698907 / 969-8907 Turbo-V TV 81-T 4.5" CF 9698908 / EX9698908 / 969-8908 Turbo-V TV 81-T 2.75" CF