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VAT 02110-AE24 46x236 Wafer Vacuum Transfer Valve

Manufacturer Part Number: 02110-AE24
Price: $3,750.00
Quantity:
VAT 02110-AE24 46x236 Wafer Vacuum Transfer Valve
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VAT 02110-AE24 46x236 Wafer Vacuum Transfer Valve

For load lock / process module isolation. For 200mm, 300mm and 450mm semiconductor applications.

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VAT 02110-AE24 46x236 Wafer Vacuum Transfer Valve

These VAT wafer transfer rectangular gate valves, also called slit valves, are listed by size.

VAT ISO valves
Valve Size
02010-AA24 46x236
02010-AE24 46x236
02010-BA24 46x236
02110-AA24 46x236
02110-AE24 46x236
02110-BA24 46x236
02010-BA44 46x236
02010-BE44 46x236
07510-UA44 46x236

VAT Part Numbering System

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