VAT 16540-PH31 ISO-100
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VAT 16540-PH31 DN ISO-100 Vacuum Pendulum Control Valve
Optimized for corrosive semiconductor and FPD processes (e. g. etching) and for cleaning processes between deposition processes. In control mode, the valve works virtually particle-free. Maintenance can be done easy and fast.
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VAT Fabrication No. 16540-PH31 DN ISO-100 Vacuum Pendulum Control Valve