VAT 26324-KA21 KF-16 Vacuum Angle Valve
Manufacturer Part Number: 26234-KA21
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VAT 26324-KA21 KF-16 HV Vacuum Angle Valve
Series 26 valves are bellows sealed and designed for high vacuum applications in pumping systems, semiconductor technology, research systems, etc.
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| Series number | 263 |
| Series name | HV angle valve DN100 - 160 |
| Description | High vacuum angle valve with bellows feedthrough and large conductance |
| Actuator types | Pneumatic actuator (single achting with closing spring NC) |
| Sealing gate | FKM (VITON®) |
| Sealing bonnet | FKM (VITON®) |
| Feedthrough | Bellows |
| Leak rate body | < 1 x 10-9 mbar ls-1 |
| Leak rate seat | < 1 x 10-9 mbar ls-1 |
| Nominal inside diameters (ID) in mm (inch) | 100 (4" ) - 160 (6" ) |
| Body material | Aluminum, stainless steel |
| Cycles until first service | 1 million cycles at Tmax 80°C |
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VAT 26324-KA21 KF-16 HV Vacuum Angle Valve
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