VAT 26324-KA21 KF-16
Manufacturer Part Number: 26234-KA21
VAT 26324-KA21 KF-16 HV Vacuum Angle Valve
Series 26 valves are bellows sealed and designed for high vacuum applications in pumping systems, semiconductor technology, research systems, etc.
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Series number | 263 |
Series name | HV angle valve DN100 - 160 |
Description | High vacuum angle valve with bellows feedthrough and large conductance |
Actuator types | Pneumatic actuator (single achting with closing spring NC) |
Sealing gate | FKM (VITON®) |
Sealing bonnet | FKM (VITON®) |
Feedthrough | Bellows |
Leak rate body | < 1 x 10-9 mbar ls-1 |
Leak rate seat | < 1 x 10-9 mbar ls-1 |
Nominal inside diameters (ID) in mm (inch) | 100 (4" ) - 160 (6" ) |
Body material | Aluminum, stainless steel |
Cycles until first service | 1 million cycles at Tmax 80°C |
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VAT Fabrication No. 26324-KA21 KF-16 HV Vacuum Angle Valve
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