VAT 26324-KA21 KF-16
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VAT 26324-KA21 KF-16 HV Vacuum Angle Valve
Series 26 valves are bellows sealed and designed for high vacuum applications in pumping systems, semiconductor technology, research systems, etc.
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|Series name||HV angle valve DN100 - 160|
|Description||High vacuum angle valve with bellows feedthrough and large conductance|
|Actuator types||Pneumatic actuator (single achting with closing spring NC)|
|Sealing gate||FKM (VITON®)|
|Sealing bonnet||FKM (VITON®)|
|Leak rate body||< 1 x 10-9 mbar ls-1|
|Leak rate seat||< 1 x 10-9 mbar ls-1|
|Nominal inside diameters (ID) in mm (inch)||100 (4" ) - 160 (6" )|
|Body material||Aluminum, stainless steel|
|Cycles until first service||1 million cycles at Tmax 80°C|
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VAT Fabrication No. 26324-KA21 KF-16 HV Vacuum Angle Valve