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VAT 26324-KA21 KF-16

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Manufacturer Part Number: 26234-KA21
VAT 26324-KA21 KF-16
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VAT 26324-KA21 KF-16

VAT 26324-KA21 KF-16 HV Vacuum Angle Valve

Series 26 valves are bellows sealed and designed for high vacuum applications in pumping systems, semiconductor technology, research systems, etc.

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Series number 263
Series name HV angle valve DN100 - 160
Description High vacuum angle valve with bellows feedthrough and large conductance
Actuator types Pneumatic actuator (single achting with closing spring NC)
Sealing gate FKM (VITON®)
Sealing bonnet FKM (VITON®)
Feedthrough Bellows
Leak rate body < 1 x 10-9 mbar ls-1
Leak rate seat < 1 x 10-9 mbar ls-1
Nominal inside diameters (ID) in mm (inch)     100 (4" ) - 160 (6" )
Body material Aluminum, stainless steel
Cycles until first service 1 million cycles at Tmax 80°C

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VAT Fabrication No. 26324-KA21 KF-16 HV Vacuum Angle Valve
VAT angle valve
Model Metal Act. Flange
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