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VAT 64244-CE52 8" OD CF Vacuum Throttle Gate Valve

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VAT 64244-CE52 8" OD CF Vacuum Throttle Gate Valve
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VAT 64244-CE52 Series 642 DN 160 8" OD CF Vacuum Throttle Control Gate Valve

For semiconductor, FPD and industrial processes, e.g. sputtering and etching systems.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Inside diameter (ID) in mm DN 160
Flange CF-F fixed flange metric threads (compatible with ISO 3669)
Body material Stainless steel
Actuator Stepper motor
Solenoid No
Position indicator No
Pressure min. 1 x 10-8 mbar
Pressure max. 2.0 bar (abs)
Feedthrough Rotary feedthrough
Sealing technology VATLOCK-System
Sealhead description FKM (VITON®)
Sealing materials FKM (VITON®)
Molecular flow conductance ls-1 5,000
Min. controllable conductance 1.6
Max. differential pressure closed position in bar 2
Max. pressure on seat side during opening in bar     0.03
Compressed air pressure max. in bar 7
Compressed air pressure min. in bar 4
Closing or opening time in sec. 6
Valve body temperature max. in °C 150
Actuator temperature max. in °C 50
Position Indicator temp. max. in °C 80
Weight in kg / lbs 28 / 61.73

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VAT 64244-CE52 Series 642 DN 160 8" OD CF Vacuum Throttle Control Gate Valve

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