Home > Vacuum Valves > Throttle > VAT > VAT 64244-PE52 DN 160 ISO-F

VAT 64244-PE52 DN 160 ISO-F

Request for Quote

To request a quote, click the button below and fill out the form.

RFQ

VAT 64244-PE52 DN 160 ISO-F
Click Image to Enlarge
VAT 64244-PE52 DN 160 ISO-F

VAT 64244-PE52 Series 642 DN 160 ISO-F Vacuum Throttle Control Gate Valve

For semiconductor, FPD and industrial processes, e.g. sputtering and etching systems.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Inside diameter (ID) in mm DN 160
Flange ISO-F
Body material Stainless steel
Actuator Stepper motor
Solenoid No
Position indicator No
Pressure min. 1 x 10-8 mbar
Pressure max. 2.0 bar (abs)
Feedthrough Rotary feedthrough
Sealing technology VATLOCK-System
Sealhead description FKM (VITON®)
Sealing materials FKM (VITON®)
Molecular flow conductance l/s-1 5,000
Min. controllable conductance 1.6
Max. differential pressure closed position in bar 2
Max. pressure on seat side during opening in bar     0.03
Compressed air pressure max. in bar 7
Compressed air pressure min. in bar 4
Closing or opening time in sec. 6
Valve body temperature max. in °C 150
Actuator temperature max. in °C 50
Position Indicator temp. max. in °C 80
Weight in kg / lbs 28 / 61.73

Request for Quote

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

VAT FILE NO 64244-PE52 Series 642 DN 160 ISO-F Vacuum Throttle Control Gate Valve