VAT 64246-CE52 10" OD CF
VAT 64246-CE52 Series 642 DN 200 OD 10" Conflat Vacuum Throttle Control Gate Valve
For semiconductor, FPD and industrial processes, e.g. sputtering and etching systems.
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|Inside diameter (ID) in mm (inch)||200 (8")|
|Flange||CF-F fixed flange metric threads (compatible with ISO 3669)|
|Body material||Stainless steel|
|Pressure min.||1 x 10-8 mbar|
|Pressure max.||2.0 bar (abs)|
|Sealhead description||FKM (VITON®)|
|Sealing materials||FKM (VITON®)|
|Molecular flow conductance ls-1||12,000|
|Min. controllable conductance||2|
|Max. differential pressure closed position in bar||2|
|Max. pressure on seat side during opening in bar||0.03|
|Closing or opening time in sec.||6|
|Valve body temperature max. in °C||150|
|Actuator temperature max. in °C||50|
|Position Indicator temp. max. in °C||80|
|Weight in kg / lbs||34 / 74.96|
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.
VAT Fabrication No. 64246-CE52 Series 642 DN 200 OD 10" Conflat Vacuum Throttle Control Gate Valve