VAT 64246-PE52 ISO-200
VAT 64246-PE52 Series 642 DN ISO-200 Vacuum Throttle Control Gate Valve
For semiconductor, FPD and industrial processes, e.g. sputtering and etching systems.
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|Inside diameter (ID) in mm||DN 200|
|Flange||ISO-F (compatible with ISO 1609)|
|Body material||Stainless steel|
|Pressure min.||1 x 10-8 mbar|
|Pressure max.||2.0 bar (abs)|
|Sealhead description||FKM (VITON®)|
|Sealing materials||FKM (VITON®)|
|Molecular flow conductance l/s-1||12,000|
|Min. controllable conductance||2|
|Max. differential pressure closed position in bar||2|
|Max. pressure on seat side during opening in bar||0.03|
|Closing or opening time in sec.||6|
|Valve body temperature max. in °C||150|
|Actuator temperature max. in °C||50|
|Weight in kg / lbs||34 / 74.96|
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VAT Fabrication No. 64246-PE52 Series 642 DN ISO-200 Vacuum Throttle Control Gate Valve