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VAT 64246-UE52 10" OD CF Vacuum Throttle Gate Valve

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VAT 64246-UE52 10" OD CF Vacuum Throttle Gate Valve
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VAT 64246-UE52 Series 642 DN 200 10" OD Conflat Vacuum Throttle Control Gate Valve

For semiconductor, FPD and industrial processes, e.g. sputtering and etching systems.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Inside diameter (ID) in mm 200 
Flange CF-F fixed flange UNF threads (compatible with ISO 3669)
Body material Stainless steel
Actuator Stepper motor
Solenoid No
Position indicator No
Pressure min. 1 x 10-8 mbar
Pressure max. 2.0 bar (abs)
Feedthrough Rotary feedthrough
Sealing technology VATLOCK-System
Sealhead description FKM (VITON®)
Sealing materials FKM (VITON®)
Molecular flow conductance ls-1 12,000
Min. controllable conductance 2
Max. differential pressure closed position in bar 2
Max. pressure on seat side during opening in bar     0.03
Closing or opening time in sec. 6
Valve body temperature max. in °C 150
Actuator temperature max. in °C 50
Position Indicator temp. max. in °C 80
Weight in kg / lbs 34 / 74.96

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VAT 64246-UE52 Series 642 DN 200 10" OD Conflat Vacuum Throttle Control Gate Valve
Throttle Gate
Model Flange
64046-CE48 10" CF
64046-UE48 10" CF
64046-CE48 10" CF
64046-UE48 10" CF
64246-CE52 10" CF
64246-UE52 10" CF
64046-PE28 ISO-200
64246-PE52 ISO-200

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