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VAT 64248-PE52 ISO-250 Vacuum Throttle Gate Valve

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VAT 64248-PE52 ISO-250 Vacuum Throttle Gate Valve
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VAT 64248-PE52 Series 642 DN ISO-250 Vacuum Throttle Control Gate Valve

For semiconductor, FPD and industrial processes, e.g. sputtering and etching systems.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Inside diameter (ID) in mm DN 250
Flange ISO-F (compatible with ISO 1609)
Body material Stainless steel
Actuator Stepper motor
Solenoid No
Position indicator No
Pressure min. 1 x 10-8 mbar
Pressure max. 1.2 bar (abs)
Feedthrough Rotary feedthrough
Sealing technology VATLOCK-System
Sealhead description FKM (VITON®)
Sealing materials FKM (VITON®)
Molecular flow conductance ls-1 22,000
Min. controllable conductance 2.5
Max. differential pressure closed position in bar 1.2
Max. pressure on seat side during opening in bar     0.03
Closing or opening time in sec. 10
Valve body temperature max. in °C 150
Actuator temperature max. in °C 50
Weight in kg / lbs 62 / 136.69

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Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

VAT 64248-PE52 Series 642 DN ISO-250 Vacuum Throttle Control Gate Valve

64048-PE52
64248-XE52

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