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VAT 64248-UE52 12" OD CF

Price: $3,600.00
VAT 64248-UE52 12" OD CF
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VAT 64248-UE52 12-inch OD CF

VAT 64248-UE52 Series 642 DN 250 12" OD CF Vacuum Throttle Control Gate Valve

For semiconductor, FPD and industrial processes, e.g. sputtering and etching systems.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Inside diameter (ID) in mm DN 250
Flange CF-F fixed flange UNF threads (compatible with ISO 3669)
Body material Stainless steel
Actuator Stepper motor
Solenoid No
Position indicator No
Pressure min. 1 x 10-8 mbar
Pressure max. 1.2 bar (abs)
Feedthrough Rotary feedthrough
Sealing technology VATLOCK-System
Sealhead description FKM (VITON®)
Sealing materials FKM (VITON®)
Molecular flow conductance l/s-1 22,000
Min. controllable conductance 2.5
Max. differential pressure closed position in bar 1.2
Max. pressure on seat side during opening in bar     0.03
Closing or opening time in sec. 10
Valve body temperature max. in °C 150
Actuator temperature max. in °C 50
Weight in kg / lbs 62 / 136.69

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VAT Fabrication No. 64248-UE52 Series 642 DN 250 12" OD CF Vacuum Throttle Control Gate Valve
Throttle Gate
Model Flange
64248-UE52 12" CF
64248-XE24 12" CF
64248-PE52 ISO-250
64248-XE52* ISO-250