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VAT 64250-TE52 10" ASA Vacuum Throttle Gate Valve

Price: $3,200.00
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VAT 64250-TE52 10" ASA Vacuum Throttle Gate Valve
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VAT 64250-UE52 Series 642 DN 320 10" ASA Vacuum Throttle Control Gate Valve

For semiconductor, FPD and industrial processes, e.g. sputtering and etching systems.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Inside diameter (ID) in mm DN 320
Flange ASA-LP (compatible with ANSI B. 16.5)
Body material Stainless steel
Actuator Stepper motor
Solenoid No
Position indicator No
Pressure min. 1 x 10-8 mbar
Pressure max. 1.2 bar (abs)
Feedthrough Rotary feedthrough
Sealing technology VATLOCK-System
Sealhead description FKM (VITON®)
Sealing materials FKM (VITON®)
Molecular flow conductance ls-1 30,000
Min. controllable conductance 3.2
Max. differential pressure closed position in bar 1.2
Max. pressure on seat side during opening in bar     0.03
Closing or opening time in sec. 10
Valve body temperature max. in °C 150
Actuator temperature max. in °C 50
Weight in kg / lbs 112 / 246.92

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VAT 64250-TE52 Series 642 DN 320 10" ASA Vacuum Throttle Control Gate Valve
Throttle Gate
Model Flange
64250-TE52 10" ASA
64250-UE52 14" OD CF
64250-UE52 14" OD CF
64250-UE52 14" OD CF
64250-CE52 14" OD CF
64250-UE52 14" OD CF

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