VAT 64250-TE52 10" ASA Vacuum Throttle Gate Valve
VAT 64250-UE52 Series 642 DN 320 10" ASA Vacuum Throttle Control Gate Valve
For semiconductor, FPD and industrial processes, e.g. sputtering and etching systems.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
|Inside diameter (ID) in mm||DN 320|
|Flange||ASA-LP (compatible with ANSI B. 16.5)|
|Body material||Stainless steel|
|Pressure min.||1 x 10-8 mbar|
|Pressure max.||1.2 bar (abs)|
|Sealhead description||FKM (VITON®)|
|Sealing materials||FKM (VITON®)|
|Molecular flow conductance l/s-1||30,000|
|Min. controllable conductance||3.2|
|Max. differential pressure closed position in bar||1.2|
|Max. pressure on seat side during opening in bar||0.03|
|Closing or opening time in sec.||10|
|Valve body temperature max. in °C||150|
|Actuator temperature max. in °C||50|
|Weight in kg / lbs||112 / 246.92|
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VAT 64250-TE52 Series 642 DN 320 10" ASA Vacuum Throttle Control Gate Valve