VAT 64250-UE52 14" OD CF Vacuum Throttle Gate Valve
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VAT 64250-UE52 Series 642 DN 320 OD 14" Conflat Vacuum Throttle Control Gate Valve
For semiconductor, FPD and industrial processes, e.g. sputtering and etching systems.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Inside diameter (ID) in mm (inch) | 320 (12") |
| Flange | CF-F fixed flange UNF threads (compatible with ISO 3669) |
| Body material | Stainless steel |
| Actuator | Stepper motor |
| Solenoid | No |
| Position indicator | No |
| Pressure min. | 1 x 10-8 mbar |
| Pressure max. | 1.2 bar (abs) |
| Feedthrough | Rotary feedthrough |
| Sealing technology | VATLOCK-System |
| Sealhead description | FKM (VITON®) |
| Sealing materials | FKM (VITON®) |
| Molecular flow conductance ls-1 | 30,000 |
| Min. controllable conductance | 3.2 |
| Max. differential pressure closed position in bar | 1.2 |
| Max. pressure on seat side during opening in bar | 0.03 |
| Closing or opening time in sec. | 10 |
| Valve body temperature max. in °C | 150 |
| Actuator temperature max. in °C | 50 |
| Weight in kg / lbs | 112 / 246.92 |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.
VAT 64250-UE52 Series 642 DN 320 OD 14" Conflat Vacuum Throttle Control Gate Valve
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