VAT 64250-UE52 14" OD CF
VAT 64250-UE52 Series 642 DN 320 OD 14" Conflat Vacuum Throttle Control Gate Valve
For semiconductor, FPD and industrial processes, e.g. sputtering and etching systems.
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|Inside diameter (ID) in mm (inch)||320 (12")|
|Flange||CF-F fixed flange UNF threads (compatible with ISO 3669)|
|Body material||Stainless steel|
|Pressure min.||1 x 10-8 mbar|
|Pressure max.||1.2 bar (abs)|
|Sealhead description||FKM (VITON®)|
|Sealing materials||FKM (VITON®)|
|Molecular flow conductance l/s-1||30,000|
|Min. controllable conductance||3.2|
|Max. differential pressure closed position in bar||1.2|
|Max. pressure on seat side during opening in bar||0.03|
|Closing or opening time in sec.||10|
|Valve body temperature max. in °C||150|
|Actuator temperature max. in °C||50|
|Weight in kg / lbs||112 / 246.92|
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VAT Fabrication No. 64250-UE52 Series 642 DN 320 OD 14" Conflat Vacuum Throttle Control Gate Valve