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VAT 65040-PH52 ISO-100 Vacuum Pendulum Control Valve

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Manufacturer Part Number: 65040-PH52
VAT 65040-PH52 ISO-100 Vacuum Pendulum Control Valve
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VAT 65040-PH52 DN ISO-100 Vacuum Pendulum Control Valve

Optimized for corrosive semiconductor and FPD processes (e. g. etching) and for cleaning processes between deposition processes. In control mode, the valve works virtually particle-free. Maintenance can be done easy and fast.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Inside diameter (ID) in mm DN 100
Flange ISO-F (compatible with ISO 1609)
Body material Aluminum hard anodized
Actuator Stepper motor
Pressure min. 1 x 10-6 mbar
Pressure max. 1.2 bar (abs)
Feedthrough Rotary feedthrough (actuator), Shaft feedthrough (sealing ring)
Sealing technology SEALRING-System
Sealhead description FKM (VITON®)
Sealing materials FKM (VITON®)
Molecular flow conductance ls-1 1,700
Min. controllable conductance 3
Max. differential pressure closed position in bar 1.2
Max. pressure on seat side during opening in bar     0.03
Compressed air pressure max. in bar 7
Compressed air pressure min. in bar 4
Closing or opening time in sec. 3 / 4
Valve body temperature max. in °C 120
Actuator temperature max. in °C 50
Weight in kg / lbs 12 / 29.46

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VAT 65040-PH52 DN ISO-100 Vacuum Pendulum Control Valve

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