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VAT 65044-PH52 ISO-160

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Manufacturer Part Number: 65044-PH52
VAT 65044-PH52 ISO-160
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VAT 65044-PH52 ISO-160

VAT 65044-PH52 DN ISO-160 Vacuum Pendulum Control Valve

Optimized for corrosive semiconductor and FPD processes (e. g. etching) and for cleaning processes between deposition processes. In control mode, the valve works virtually particle-free. Maintenance can be done easy and fast.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Inside diameter (ID) in mm DN 160
Flange ISO-F (compatible with ISO 1609)
Body material Aluminum hard anodized
Actuator Stepper motor
Pressure min. 1 x 10-6 mbar
Pressure max. 1.2 bar (abs)
Feedthrough Rotary feedthrough (actuator), Shaft feedthrough (sealing ring)
Sealing technology SEALRING-System
Sealhead description FKM (VITON®)
Sealing materials FKM (VITON®)
Molecular flow conductance ls-1 5,000
Min. controllable conductance 5
Max. differential pressure closed position in bar 1.2
Max. pressure on seat side during opening in bar     0.01
Compressed air pressure max. in bar 7
Compressed air pressure min. in bar 4
Closing or opening time in sec. 3 / 4
Valve body temperature max. in °C 120
Actuator temperature max. in °C 50
Weight in kg / lbs 18 / 39.68

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Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

VAT Fabrication No. 65044-PH52 DN ISO-160 Vacuum Pendulum Control Valve