VAT 65046-PA52 ISO-200
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VAT 65046-PA52 DN ISO-200 Vacuum Pendulum Control Valve
Optimized for corrosive semiconductor and FPD processes (e. g. etching) and for cleaning processes between deposition processes. In control mode, the valve works virtually particle-free. Maintenance can be done easy and fast.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
|Inside diameter (ID) in mm||DN 200|
|Flange||ISO-F (compatible with ISO 1609)|
|Pressure min.||1 x 10-8 mbar|
|Pressure max.||1.2 bar (abs)|
|Feedthrough||Rotary feedthrough (actuator), Shaft feedthrough (sealing ring)|
|Sealhead description||FKM (VITON®)|
|Sealing materials||FKM (VITON®)|
|Molecular flow conductance l/s-1||12,000|
|Min. controllable conductance||10|
|Max. differential pressure closed position in bar||1.2|
|Max. pressure on seat side during opening in bar||0.005|
|Compressed air pressure max. in bar||7|
|Compressed air pressure min. in bar||4|
|Closing or opening time in sec.||3 / 4|
|Valve body temperature max. in °C||120|
|Actuator temperature max. in °C||50|
|Weight in kg / lbs||22 / 48.5|
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.
VAT Fabrication No. 65046-PA52 DN ISO-200 Vacuum Pendulum Control Valve