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VAT 65046-PH52 ISO-200 Vacuum Pendulum Control Valve

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Manufacturer Part Number: 65046-PH52-BGW1/0026
VAT 65046-PH52 ISO-200 Vacuum Pendulum Control Valve
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VAT 65046-PH52 ISO-200 Vacuum Pendulum Control Valve

Optimized for corrosive semiconductor and FPD processes (e. g. etching) and for cleaning processes between deposition processes. In control mode, the valve works virtually particle-free. Maintenance can be done easy and fast.

Specifications Series 650
Power input 24 VDC, 60 W max.
Ambient temp. 0 - 50°C
Control accuracy 0.1% of sensor full scale
Step resolution DN160 - DN250: 12'444 positions (full stroke)
DN320 - DN400: 13'440 positions (full stroke)
Sensor input 0-10 VDC linear to pressure
differential, Ri > 100kOhm
Sensor supply + 24 VDC, +/- 15VDC
Power failure option Battery type: Ultracap
Charging time: 2 min
Durability (25°C) up to 10 years
Input interface Digital: control with relay, opto coupler or voltage source (5-24 VDC)
Analog: 0 - 10 VDC, Ri > 100kOhm
Output interface Digital: potential free relay contacts, 70V max., 500 mA max., 10 W max.
Analog: 0 - 10 VDC, 1 mA max.

 

Inside diameter (ID) in mm (inch) 200 (8" )
Flange ISO-F (compatible with ISO 1609 Fig.1)
Body material Aluminium hard anodized
Actuator Stepper motor
Pressure min. 1•10-6 mbar
Pressure max. 1.2 bar (abs)
Feedthrough Rotary feedthrough (actuator), Shaft feedthrough (sealing ring)
Sealing technology SEALRING-System
Sealhead Description FKM (VITON®)
Sealing materials FKM (VITON®)
Molecular flow conductance ls-1 12000
Min. controllable conductance 10
Max. differential pressure closed position in bar 1.2
Max. pressure on seat side during opening in bar 0.005
Compressed air pressure max. in bar 7
Compressed air pressure min. in bar 4
Closing or opening time in sec. 3 / 4
Valve body temperature max. in °C 120
Actuator temperature max. in °C 50
Weight in kg / lbs 22 / 48.5
Open or Close time 0.9
 

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VAT 65046-PH52 ISO-200 Vacuum Pendulum Control Valve

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