VAT 65148-PACW ISO-250
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VAT 65148-PACW DN ISO-250 Vacuum Pendulum Control Valve
Optimized for corrosive semiconductor and FPD processes (e. g. etching) and for cleaning processes between deposition processes. In control mode, the valve works virtually particle-free. Maintenance can be done easy and fast.
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|Inside diameter (ID) in mm||DN 250|
|Flange||ISO-F (compatible with ISO 1609)|
|Actuator||UC-PFO / SPS, RS232 interface with 2 analog outputs / 2 sensors|
|Power Failure Option (PFO)||Yes|
|Sensor Power Supply (SPS)||1|
|Interface||RS232 with analog output|
|Number of Sensor(s)||2|
|Pressure min.||1 x 10-8 mbar|
|Pressure max.||1.2 bar (abs)|
|Feedthrough||Rotary feedthrough (actuator), Shaft feedthrough (sealing ring)|
|Sealhead description||FKM (VITON®)|
|Sealing materials||FKM (VITON®)|
|Molecular flow conductance ls-1||22,000|
|Min. controllable conductance||2.5|
|Max. differential pressure closed position in bar||1.2|
|Max. pressure on seat side during opening in bar||0.005|
|Compressed air pressure max. in bar||7|
|Compressed air pressure min. in bar||4|
|Closing or opening time in sec.||4 / 4|
|Valve body temperature max. in °C||120|
|Actuator temperature max. in °C||50|
|Weight in kg / lbs||29 / 63.93|
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.
VAT Fabrication No. 65148-PACW DN ISO-250 Vacuum Pendulum Control Valve