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VAT 65150-PHCG ISO-320

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Manufacturer Part Number: 65150-PHCG
VAT 65150-PHCG ISO-320
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VAT 65150-PHCG ISO-320

VAT 65150-PHCG ISO-320 Vacuum Pendulum Control Valve

Optimized for corrosive semiconductor and FPD processes (e. g. etching) and for cleaning processes between deposition processes. In control mode, the valve works virtually particle-free. Maintenance can be done easy and fast.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Inside diameter (ID) in mm 320 (12")
Flange ISO-F (compatible with ISO 1609)
Body material Aluminum hard anodized
Actuator UC-PFO / SPS, RS232 interface / 1 sensor
Pressure min. 1 x 10-6 mbar
Pressure max. 1.2 bar (abs)
Molecular flow conductance ls-1 30000.0
Max. differential pressure (closed position in bar) 1.2
Max. pressure on seat side during opening in bar     0.005
Weight in kg/lbs 48 / 105.82

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Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

VAT Fabrication No. 65150-PHCG ISO-320 Vacuum Pendulum Control Valve