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VAT 65150-PHCG ISO-320

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Manufacturer Part Number: 65150-PHCG
VAT 65150-PHCG ISO-320
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VAT 65150-PHCG ISO-320

VAT 65150-PHCG ISO-320 Vacuum Pendulum Control Valve

Optimized for corrosive semiconductor and FPD processes (e. g. etching) and for cleaning processes between deposition processes. In control mode, the valve works virtually particle-free. Maintenance can be done easy and fast.

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Inside diameter (ID) in mm 320 (12")
Flange ISO-F (compatible with ISO 1609)
Body material Aluminum hard anodized
Actuator UC-PFO / SPS, RS232 interface / 1 sensor
Pressure min. 1 x 10-6 mbar
Pressure max. 1.2 bar (abs)
Molecular flow conductance ls-1 30000.0
Max. differential pressure (closed position in bar) 1.2
Max. pressure on seat side during opening in bar     0.005
Weight in kg/lbs 48 / 105.82

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VAT Fabrication No. 65150-PHCG ISO-320 Vacuum Pendulum Control Valve