VAT 65150-PHCG ISO-320
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VAT 65150-PHCG ISO-320 Vacuum Pendulum Control Valve
Optimized for corrosive semiconductor and FPD processes (e. g. etching) and for cleaning processes between deposition processes. In control mode, the valve works virtually particle-free. Maintenance can be done easy and fast.
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|Inside diameter (ID) in mm||320 (12")|
|Flange||ISO-F (compatible with ISO 1609)|
|Body material||Aluminum hard anodized|
|Actuator||UC-PFO / SPS, RS232 interface / 1 sensor|
|Pressure min.||1 x 10-6 mbar|
|Pressure max.||1.2 bar (abs)|
|Molecular flow conductance ls-1||30000.0|
|Max. differential pressure (closed position in bar)||1.2|
|Max. pressure on seat side during opening in bar||0.005|
|Weight in kg/lbs||48 / 105.82|
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.
VAT Fabrication No. 65150-PHCG ISO-320 Vacuum Pendulum Control Valve