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Yaskawa XU-ACT152L-C10 Wafer Handling Robot Track

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Yaskawa XU-ACT152L-C10 Wafer Handling Robot Track
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Yaskawa XU-ACT152L-C10 Wafer Handling Robot
Yaskawa
Model #   Serial #
XU-RC350D |  
XU-RC400M-A00 |  
VS2B | 7J2013501
NXC100, ERCR-NS00-B000 | S5M851-4-01
NXC100, ERCR-NS01-B004   S65V94-2-02
RC/ELC1   G68561-1-1-8, DDMQF-SR2232IR
XU-ACP130-A03   S4M619-3-01
XU-ACT152L-C10   S65U33-2-04