Adixen Alcatel A103P iPUP - REBUILT
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SKU
REBUILT_A103PiPUP
| Weight | 276 lbs |
|---|---|
| Pumping Speed | 70 cfm |
| Ultimate Pressure | 6.5 x 10-3 mbar |
Adixen Alcatel A103P iPUP Semiconductor Dry Vacuum Pump - REBUILT
The pump is designed for applications that require the pumping of clean (dust-free) and non-corrosive gases. Examples are:
- Instrumentation
- Gas analysis
- Electronic microscope
- X-ray spectrometer
- Leak detection
- Surface analyzer
- Research and development
- Semiconductor fabrication
- Load lock and transfer chamber pumping
- Wafer back pumping
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Peak pumping speed 50 and 60 Hz | 120 m3h / 70 cfm / 2,000 l/mn |
| Typical ultimate pressure (no N2 purge) | 6.5 x 10-3 mbar / 5 x 10-3 Torr |
| Typical ultimate pressure (20 SLM N2 purge) | 2.6 x 10-2 mbar / 2 x 10-2 Torr |
| Power consumption : ultimate pressure | 1.0 kW |
| Power consumption : motor rating | 2.5 kW |
| Power supply | 200 - 208V / 380 - 480V 3-phase 50/60 Hz |
| Cooling water connection | 1/4” NPT quick connect |
| Cooling water temperature | 10 - 25°C |
| Cooling water flow (min.) | 90 l/h / 1.5 l/min / 0.39 gpm |
| N2 purge flow range | 5 to 60 SLM |
| Average noise level | < 58 dBA |
| Dimensions | 684 x 310 x 323 mm / 26.9 x 12.2 x 12.7 in |
| Weight | 125 kg / 276 lbs |
| Inlet connection | DN 50 ISO-K/KF |
| Exhaust connection | DN 25 ISO-K/KF |
| Type | Label | Description | Download |
|---|---|---|---|
|
Pfeiffer Adixen A3P Series - REBUILT | Operating Instructions | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Adixen Alcatel A103P iPUP Semiconductor Dry Vacuum Pump - REBUILT
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