Edwards iF1800 - REBUILT
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|Pumping Speed||1720 m3/h|
|Ultimate Pressure||8 x 10-4 mbar|
Edwards iF1800 Semiconductor Dry Vacuum Pump - REBUILT
Edwards iH and iF system dry pumps are designed specifically for difficult semiconductor processes that produce unwanted by-products or corrosion. The Edwards iL model is an economy version which cannot tolerate as much process contamination. We also offer repair service.
- Gas Module: controls nitrogen purges and monitors exhaust pressure.
- Dry Pump Control Module: controls the gas module, interprets signals from thermocouples and other sensors, and activates warning and alarms when necessary.
- Electrics Module: used for low voltage power requirements.
- Dry Pump Display Terminal: hand-held module (game boy) normally kept above the electronics enclosure which allows simple local monitoring and control.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
|Parameter||50 Hz||60 Hz|
|Typical peak pumping speed||1,720 m3h-1||1,800 m3h-1|
|Typical ultimate vacuum with shaft seals purge only (50 and 60 Hz)||8 x 10-4 mbar
|5 x 10-4 mbar
|Maximum inlet pressure (50 and 60 Hz)||Atmospheric mbar / Pa|
|Maximum operating time at maximum inlet pressure (50 and 60 Hz)||60 seconds|
|Noise level measured at 1 m from the pump (with enclosure panels fitted)||< 64 dB(A)||< 69 dB(A)|
|Warm-up time to nominal pumping performance||15 min|
|Minimum warm-up time to process gas pumping||4 hours|
|Vacuum system maximum leak-rate||1 x 10-5 mbar l/s (1 x 10-3 Pa l/s)|
|Exhaust system maximum leak-rate||1 x 10-5 mbar l/s (1 x 10-3 Pa l/s)|
|Ambient operating temperature range||5 to 40°C|
|Maximum ambient operating humidity||90% RH|
|Edwards iF1800 - REBUILT||Instruction Manual||Download|
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Edwards iF1800 Semiconductor Dry Vacuum Pump - REBUILT A53323945 / A533-23-945 200/208V 50/60Hz three-phase A53323974 / A533-23-974 440V 60Hz 3-phase A53323975 / A533-23-975