MKS ENI GHW-50A Genesis
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USED MKS ENI GHW-50A Genesis 13.56 MHz RF Plasma Generator
The GHW-25 / GHW-50 Genesis plasma generator is a rugged RF power source for plasma etching, CVD and sputtering applications. Featuring precise power control and digital interfacing, this Genesis generator provides the exceptional reliability and repeatability required for today's demanding plasma processes.
Operating at the frequency of 27.12 MHz, 13.56 MHz or 40.68 MHz, the GHW-25 / GHW-50 Genesis generator produces 2,500W or 5,000W of power into a 50Ω load. The DSP-based control module automatically measures forward RF power and reflected RF power, maintaining constant power output within ±1% of set point over a dynamic power range of < 0 to 3,000 watts or 0 to 5,000 watts.
Precise power calibration is traceable to NIST (National Institute of Standards and Technology) through the ENI Power Standard. Low harmonic distortion and spurious-free performance complement the unit's RF power output control and unconditional RF stability.
A rugged RF power section ensures substantial power delivery into fixed match systems. The DSP-based control constantly monitors internal subsystem status to maximize system availability. Extensive built-in diagnostics and internal fail-safe memory simplify maintenance requirements and increase system uptime.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
|Rated power output||2,500W into 50Ω load||5,000W into 50Ω load|
|Mismatched power output||Worst phase forward power referenced to rating:|
|Dynamic power range||0 to 2,500W||0 to 5,000W|
|Load impedance range||Unlimited|
|RF stability / spurious output||Unconditionally stable for any load within operational limits / < -50dBc|
|Harmonic output / distortion||< -40dBc|
|Power control / regulation||AC line-to-power: 0.5% max. change in output power over rated line voltage range.
Regulation tolerance is referenced from set point. Subject to limits of forward and reverse power and current, accuracy relative to ENI Power Standard 8000-517-TP.
|Load mismatch protection||Automatic; forward power limits typically 0.25ms after reverse power reaches a pre-programmed level 20% of rated power|
|Primary AC power source||200/208 VAC nominal (180V-230V) at 15A - North American version; 380/400 VAC nominal (342-440V) at 7.5A - European version; three-phase 47Hz min to 63Hz max||200/208 VAC nominal (180V-230V) at 30A - North American version; 380/400 VAC nominal (342-440V) at 15A - European version; 3-phase 47Hz min to 63Hz max|
|Power factor at max output into 50Ω||> 0.85|
|Cooling system||Water flow at 2.0 gal/min (6.6 liters) min. at +5° to +35°C. Connections provided to accept 3/8" male (NPT) pipe thread|
|EMC & safety compliance||Product will be NRTL listed and compliant to the European Union's Low-Voltage Directive
Product will be compliant to the European Union's EMC Directive
|Power indicator||Optional digital readout displays frequency and forward, reflected and load power|
|Size* (H x W x D)||5.25 x 19" rack mount x 20.5" (133 x 483 x 521 mm)||8.72 x 18.90" rack mount x 22.10" (221. 5 x 480 x 560 mm)|
|Weight||55 lbs (24.9 kg)||91 lbs (41 kg)|
|Remote interface connector||Standard: Subminiature Type D 9-pin digital; optional custom analog interface cards available|
|RF output connector||Type N or custom||Type HN or custom|
|Rack mounting||19-inch adapters supplied|
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
USED MKS ENI GHW-50A Genesis 13.56 MHz RF Plasma Generator GHW50A-S-02-042, AMAT 0190-07492 GHW55A-13DF4L0-001